Design, optimization and fabrication of surface micromachined pressure sensors

Mechatronics

Volumn 8, Issue 5, 1998, Pages 505-519

  Lin, Liwei ^a   Yun, Weijie ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b SiTek Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAPHRAGMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; RESISTORS;

LOW PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD); PRESSURE SENSORS;

MICROSENSORS;

EID: 0032141746     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0957-4158(98)00012-9     Document Type: Article

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