Preparation of plasma-polymerized SiOx-like thin films from a mixture of hexamethyldisiloxane and oxygen to improve the corrosion behaviour

Surface and Coatings Technology

Volumn 200, Issue 9, 2006, Pages 3035-3040

  Vassallo, E ^a   Cremona, A ^a   Laguardia, L ^a   Mesto, E ^b  

^a CNR   (Italy)

^b UNIVERSITY OF BARI   (Italy)

Author keywords

Corrosion; PECVD; Plasma polymerization

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CORROSION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MIXTURES; OXYGEN; PLASMA POLYMERIZATION; SILICON COMPOUNDS; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CORROSION BEHAVIOUR; HEXAMETHYLDISILOXANE; PLASMA-ENHANCED CHEMICAL VAPOUR DEPOSITION (PECVD); SURFACE CHEMICAL CHARACTERIZATION;

PROTECTIVE COATINGS;

CHEMICAL VAPOR DEPOSITION; CORROSION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MIXTURES; OXYGEN; PLASMA POLYMERIZATION; PROTECTIVE COATINGS; SILICON COMPOUNDS; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 30944445254     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.11.001     Document Type: Article

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