Improvement of dielectric properties of BLT thin films deposited by magnetron sputtering

Journal of Physics: Conference Series

Volumn 94, Issue 1, 2008, Pages

  Besland, M P ^a   Borderon, C ^a   Barroy, P R J ^a   Le Tacon, S ^a   Richard Plouet, M ^a   Averty, D ^a   Tessier, P Y ^a   Gundel, H W ^a   Brohan, L ^a   Djouadi, M A ^a  

^a UNIVERSITÉ DE NANTES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 38949097764     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/94/1/012006     Document Type: Article

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