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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 1, 2008, Pages 227-231

Surface plasmon assisted contact scheme nanoscale photolithography using an UV lamp

(2) Shao, Dongbing a Chen, Shaochen a

a The University of Texas at Austin (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INCOHERENT LIGHT; METALLIC MASK; SP-LIGHT COUPLING; SURFACE PLASMON ASSISTED NANOLITHOGRAPHY (SPAN);

CONTACT ANGLE; ELECTRON BEAM LITHOGRAPHY; FINITE DIFFERENCE TIME DOMAIN METHOD; LIGHT SOURCES; PHOTOLITHOGRAPHY;

SURFACE PLASMON RESONANCE;

EID: 38849127630 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2834688 Document Type: Article

Times cited : (13)

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