메뉴 건너뛰기




Volumn 46, Issue 32, 2007, Pages 7797-7804

Polarization-dependent vacuum-ultraviolet reflectometry using elliptically polarized synchrotron radiation

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT REFLECTION; PHOTODETECTORS; STORAGE RINGS; SYNCHROTRON RADIATION; ULTRAVIOLET RADIATION; UNCERTAINTY ANALYSIS;

EID: 38849086615     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.007797     Document Type: Article
Times cited : (10)

References (22)
  • 1
    • 33644614820 scopus 로고    scopus 로고
    • Calibration of space instrumentation with synchrotron radiation
    • M. Richter, A. Gottwald, F. Scholze, R. Thornagel, and G. Ulm, "Calibration of space instrumentation with synchrotron radiation," Adv. Space Res. 37, 265-272 (2006).
    • (2006) Adv. Space Res , vol.37 , pp. 265-272
    • Richter, M.1    Gottwald, A.2    Scholze, F.3    Thornagel, R.4    Ulm, G.5
  • 3
    • 4444239860 scopus 로고
    • On the classical radiation of accelerated electrons
    • J. Schwinger, "On the classical radiation of accelerated electrons," Phys. Rev. 75, 1912-1925 (1949).
    • (1949) Phys. Rev , vol.75 , pp. 1912-1925
    • Schwinger, J.1
  • 4
    • 0035894439 scopus 로고    scopus 로고
    • J. H. Burnett, Z. H. Levine, and E. L. Shirley, Intrinsic birefringence in calcium fluoride and barium fluoride, Phys. Rev. B 64, 241102R (2001).
    • J. H. Burnett, Z. H. Levine, and E. L. Shirley, "Intrinsic birefringence in calcium fluoride and barium fluoride," Phys. Rev. B 64, 241102R (2001).
  • 5
  • 6
    • 0009328119 scopus 로고
    • Polarization studies in the vacuum ultraviolet
    • R. N. Hamm, R. A. McRae, and E. T. Arakawa, "Polarization studies in the vacuum ultraviolet," J. Opt. Soc. Am. 55, 1560-1463 (1965).
    • (1965) J. Opt. Soc. Am , vol.55 , pp. 1560-1463
    • Hamm, R.N.1    McRae, R.A.2    Arakawa, E.T.3
  • 7
    • 0017955947 scopus 로고
    • Design criteria for reflection polarizers and analyzers in the vacuum ultraviolet
    • W. R. Hunter, "Design criteria for reflection polarizers and analyzers in the vacuum ultraviolet," Appl. Opt. 17, 1259-1270 (1978).
    • (1978) Appl. Opt , vol.17 , pp. 1259-1270
    • Hunter, W.R.1
  • 8
    • 33947325814 scopus 로고    scopus 로고
    • Tunable thin film polarizer for the vacuum ultraviolet and soft x-ray spectral regions
    • M. Yang, C. Cobet, and N. Esser, "Tunable thin film polarizer for the vacuum ultraviolet and soft x-ray spectral regions," J. Appl. Phys. 101, 053114 (2007).
    • (2007) J. Appl. Phys , vol.101 , pp. 053114
    • Yang, M.1    Cobet, C.2    Esser, N.3
  • 10
    • 0004330301 scopus 로고
    • Tunable multilayer EUV/soft x-ray polarimeter
    • J. B. Kortright, M. Rice, and K. D. Franck, "Tunable multilayer EUV/soft x-ray polarimeter," Rev. Sci. Instrum. 66, 1567-1569 (1995).
    • (1995) Rev. Sci. Instrum , vol.66 , pp. 1567-1569
    • Kortright, J.B.1    Rice, M.2    Franck, K.D.3
  • 13
    • 85075862975 scopus 로고
    • Precision soft x-ray reflectometry of curved multilayer optics
    • M. Krumrey, M. Kühne, P. Müller, and F. Scholze, "Precision soft x-ray reflectometry of curved multilayer optics," Proc. SPIE 1547, 136-143 (1991).
    • (1991) Proc. SPIE , vol.1547 , pp. 136-143
    • Krumrey, M.1    Kühne, M.2    Müller, P.3    Scholze, F.4
  • 15
    • 33751555663 scopus 로고    scopus 로고
    • Tech. Rep. BESSY 201/96 Berliner Elektronenspeicherring-Gesellschaft für Synchrotronstrahlung, m.b.h
    • F. Schäfers and M. Krumrey, "REFLEC," Tech. Rep. BESSY 201/96 (Berliner Elektronenspeicherring-Gesellschaft für Synchrotronstrahlung, m.b.h., 1996).
    • (1996) REFLEC
    • Schäfers, F.1    Krumrey, M.2
  • 16
    • 15844400105 scopus 로고    scopus 로고
    • High-accuracy VUV reflectometry at selectable sample temperatures
    • A. Gottwald, U. Kroth, M. Letz, H. Schöppe, and M. Richter, "High-accuracy VUV reflectometry at selectable sample temperatures," Proc. SPIE 5538, 157-164 (2004).
    • (2004) Proc. SPIE , vol.5538 , pp. 157-164
    • Gottwald, A.1    Kroth, U.2    Letz, M.3    Schöppe, H.4    Richter, M.5
  • 17
    • 33645786771 scopus 로고    scopus 로고
    • Polarization and higher-order content measurement of a soft-x-ray monochromatized beam with Mo-Si multilayers
    • M.-G. Pelizzo, F. Frassetto, P. Nicolosi, A. Giglia, N. Mahne, and S. Nannarone, "Polarization and higher-order content measurement of a soft-x-ray monochromatized beam with Mo-Si multilayers," Appl. Opt. 45, 1985-1992 (2006).
    • (2006) Appl. Opt , vol.45 , pp. 1985-1992
    • Pelizzo, M.-G.1    Frassetto, F.2    Nicolosi, P.3    Giglia, A.4    Mahne, N.5    Nannarone, S.6
  • 18
    • 33749846532 scopus 로고    scopus 로고
    • Reflectance measurements and optical constants in the extreme ultraviolet-vacuum ultraviolet regions for SiC with different C/Si ratio
    • D. Garoli, F. Frassetto, G. Monaco, P. Niccolosi, M. G. Pelizzo, F. Rigato, V. Rigato, A. Giglia, and S. Nannarone, "Reflectance measurements and optical constants in the extreme ultraviolet-vacuum ultraviolet regions for SiC with different C/Si ratio," Appl. Opt. 45, 5642-5650 (2006).
    • (2006) Appl. Opt , vol.45 , pp. 5642-5650
    • Garoli, D.1    Frassetto, F.2    Monaco, G.3    Niccolosi, P.4    Pelizzo, M.G.5    Rigato, F.6    Rigato, V.7    Giglia, A.8    Nannarone, S.9
  • 19
    • 1442356001 scopus 로고    scopus 로고
    • Mo/B4C/Si multilayer-coated photodiode with polarization sensitivity at an extreme-ultraviolet wavelength of 13.5 nm
    • B. Kjornrattanawanich, S. Bajt, and J. F. Seely, "Mo/B4C/Si multilayer-coated photodiode with polarization sensitivity at an extreme-ultraviolet wavelength of 13.5 nm," Appl. Opt. 43, 1082-1090 (2004).
    • (2004) Appl. Opt , vol.43 , pp. 1082-1090
    • Kjornrattanawanich, B.1    Bajt, S.2    Seely, J.F.3
  • 20
    • 33846230580 scopus 로고    scopus 로고
    • Experimental determination of optical constants in the vacuum ultra violet wavelength region between 80 and 140 nm: A reflectance versus thickness method and its application to ZnSe
    • F. Bridou, M. Cuniot-Ponsard, and J-M. Desvignes, "Experimental determination of optical constants in the vacuum ultra violet wavelength region between 80 and 140 nm: a reflectance versus thickness method and its application to ZnSe," Opt. Commun. 271, 353-360 (2007).
    • (2007) Opt. Commun , vol.271 , pp. 353-360
    • Bridou, F.1    Cuniot-Ponsard, M.2    Desvignes, J.-M.3
  • 21
    • 0347501616 scopus 로고
    • Automatic characterization of layers stacks from reflectivity measurements. Application to the study of the validity conditions of the grazing X-rays reflectometry
    • F. Bridou and B. Pardo, "Automatic characterization of layers stacks from reflectivity measurements. Application to the study of the validity conditions of the grazing X-rays reflectometry," J. Opt. 21, 183-191 (1990).
    • (1990) J. Opt , vol.21 , pp. 183-191
    • Bridou, F.1    Pardo, B.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.