Mo B4C Si multilayer-coated photodiode with polarization sensitivity at an extreme-ultraviolet wavelength of 13.5 nm

Applied Optics

Volumn 43, Issue 5, 2004, Pages 1082-1090

  Kjornrattanawanich, Benjawan ^a   Bajt, Saša ^b   Seely, John F ^c  

^a UNIVERSITIES SPACE RESEARCH ASSOCIATION   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^c NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BORON COMPOUNDS; COATINGS; LIGHT POLARIZATION; MICROSCOPIC EXAMINATION; MOLYBDENUM; MULTILAYERS; POLARIMETERS; SENSITIVITY ANALYSIS; SILICON; ULTRAVIOLET RADIATION;

MULTILAYER-COATED PHOTODIODES; POLARIZATION RATIO;

PHOTODIODES;

EID: 1442356001     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.43.001082     Document Type: Conference Paper

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