Growth of TiOx films by high power pulsed magnetron sputtering from a compound TiO1.8 target

Reviews on Advanced Materials Science

Volumn 15, Issue 1, 2007, Pages 44-48

  Sarakinos, K ^a   Alami, J ^a   Klever, C ^a   Wuttig, M ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; DENSITY (SPECIFIC GRAVITY); INORGANIC COATINGS; MAGNETRON SPUTTERING; REFRACTIVE INDEX; TITANIUM OXIDES; TRANSPARENCY;

DC MAGNETRON SPUTTERING; HIGH POWER PULSED MAGNETRON SPUTTERING;

FILM GROWTH;

EID: 38549109684     PISSN: 16065131     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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