Gas-sensing applications of W-Ti-O-based nanosized thin films prepared by r.f. reactive sputtering

Sensors and Actuators, B: Chemical

Volumn 44, Issue 1-3, 1997, Pages 499-502

  Ferroni, M ^a   Guidi, V ^a   Martinelli, G ^a   Nelli, P ^b   Sberveglieri, G ^a,b  

^a UNIVERSITY OF FERRARA   (Italy)

^b UNIVERSITY OF BRESCIA   (Italy)

Author keywords

r.f. reactive sputtering; Thin films; WO3; NO2

Indexed keywords

ANNEALING; ELECTRON MICROSCOPY; IONS; MORPHOLOGY; NANOSTRUCTURED MATERIALS; NITROGEN OXIDES; POLYCRYSTALLINE MATERIALS; SPUTTERING; THIN FILMS; TITANIUM; TUNGSTEN COMPOUNDS;

RADIOFREQUENCY REACTIVE SPUTTERING;

CHEMICAL SENSORS;

EID: 0031250695     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)00173-1     Document Type: Article

References (8)

1. P. Nelli, G. Sberveglieri, in A. D'Amico, G. Sberveglieri (eds.), Sensors for Domestic Applications, World Scientific, Boston, 1995, pp. 37-48.
2. N. Yamazoe, N. Miura, in S. Yamauchi (ed.), Chemical Sensor Technology, vol. 4, Kodansha and Elsevier, Singapore, 1992, pp. 19-24.
3. x sensors for exhaust monitoring, Sensors and Actuators B 20 (1994) 111-117.
4. 2 oxygen sensors, Sensors and Actuators B 1 (1990) 103-107.
5. x monitoring, Sensors and Actuators B 26-27 (1995) 89-92.
6. M. Ferroni, V. Guidi, G. Martinelli, G. Sberveglieri, Microstructural characterization of a titanium-tungsten oxide gas sensor, J. Mater. Res. 12 (1997) 793-798.
7. 2 thin film, Adv. Mater. 8 (1996) 334-337.
8. 2 gas sensor, Nanostruct. Mater. 7 (1996) 709-718.