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Volumn 44, Issue 1-3, 1997, Pages 499-502
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Gas-sensing applications of W-Ti-O-based nanosized thin films prepared by r.f. reactive sputtering
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Author keywords
r.f. reactive sputtering; Thin films; WO3; NO2
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Indexed keywords
ANNEALING;
ELECTRON MICROSCOPY;
IONS;
MORPHOLOGY;
NANOSTRUCTURED MATERIALS;
NITROGEN OXIDES;
POLYCRYSTALLINE MATERIALS;
SPUTTERING;
THIN FILMS;
TITANIUM;
TUNGSTEN COMPOUNDS;
RADIOFREQUENCY REACTIVE SPUTTERING;
CHEMICAL SENSORS;
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EID: 0031250695
PISSN: 09254005
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-4005(97)00173-1 Document Type: Article |
Times cited : (59)
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References (8)
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