Nanolayered Au/Ti/Al ohmic contacts to P-type SiC: Electrical, morphological and chemical properties depending on the contact composition

Materials Science Forum

Volumn 556-557, Issue , 2007, Pages 725-728

  Kolaklieva, L ^a   Kakanakov, R ^a   Avramova, I ^b   Marinova, Ts ^b  

^a BULGARIAN ACADEMY OF SCIENCES   (Bulgaria)

^b INSTITUTE OF GENERAL AND INORGANIC CHEMISTRY   (Bulgaria)

Author keywords

AFM; Al Ti composite; Contact resistivity; Ohmic contacts; XPS

Indexed keywords

ANNEALING; BINARY ALLOYS; CHEMICAL PROPERTIES; ELECTRIC CONTACTORS; MORPHOLOGY; OHMIC CONTACTS; SILICON CARBIDE; SURFACE MORPHOLOGY; SURFACE ROUGHNESS; TITANIUM; TITANIUM ALLOYS; X RAY PHOTOELECTRON SPECTROSCOPY;

AL-CONCENTRATION; CONTACT RESISTIVITIES; ELEMENT DISTRIBUTION; INTERFACE CHEMISTRY; OPTIMAL ANNEALING; P-TYPE SIC; RESISTIVITY VALUES;

ALUMINUM ALLOYS;

EID: 38449121619     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/MSF.556-557.725     Document Type: Conference Paper

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