Morphological study of the Al-Ti ohmic contact to p-type SiC

Solid-State Electronics

Volumn 46, Issue 5, 2002, Pages 689-693

  Mohney, S E ^a   Hull, B A ^a   Lin, J Y ^a   Crofton, J ^b,c  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b MURRAY STATE UNIVERSITY   (United States)

^c UNIVERSITY OF KENTUCKY   (United States)

Author keywords

Aluminum; Ohmic contact; SiC; Titanium

Indexed keywords

ALUMINUM; ANNEALING; ATOMIC FORCE MICROSCOPY; INTERFACES (MATERIALS); MORPHOLOGY; PHASE DIAGRAMS; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; SURFACE ROUGHNESS;

SEMICONDUCTOR INTERFACES;

OHMIC CONTACTS;

EID: 0036568350     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(01)00327-6     Document Type: Article

References (13)