Growth and properties of gadolinium oxide dielectric layers on silicon carbide for high-k application

Materials Science Forum

Volumn 556-557, Issue , 2007, Pages 655-658

  Fissel, A ^a   Czemohorsky, M ^a   Dargis, R ^a   Osten, H J ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

C V; High k dielectrics; I V; MBE; Rare earth metal oxide; XPS; XRD

Indexed keywords

EID: 38449118185     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-442-1.655     Document Type: Conference Paper

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