Damage-free surface treatment of carbon nanotubes and self-assembled monolayer devices using a neutral beam process for fusing top-down and bottom-up processes

Journal of Physics D: Applied Physics

Volumn 41, Issue 2, 2008, Pages

  Samukawa, Seiji ^a   Ishikawa, Yasushi ^a   Okumura, Keiji ^a   Sato, Yoshinori ^a   Tohji, Kazuyuki ^a   Ishida, Takao ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; PARTICLE BEAMS; RADIATION DAMAGE; SELF ASSEMBLED MONOLAYERS; SURFACE DEFECTS; SURFACE TREATMENT;

NANOSCALE DEVICES; NEUTRAL BEAM PROCESS; NEUTRAL BEAMS;

CARBON NANOTUBES;

EID: 38049014889     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/2/024006     Document Type: Article

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