Characteristics of transparent conducting nano-scaled thin films based on ZnO

Journal of the American Ceramic Society

Volumn 89, Issue 12, 2006, Pages 3676-3680

  Ting, Jyh Ming ^a   Lin, Chia Kang ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CONDUCTIVE MATERIALS; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; HEAT TREATMENT; OPACITY; SANDWICH STRUCTURES; SPUTTER DEPOSITION; THIN FILMS; ZINC OXIDE;

ELECTRICAL TRANSPORT; TRANSPARENT CONDUCTING;

NANOSTRUCTURED MATERIALS;

EID: 37849187026     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2006.01316.x     Document Type: Article

References (21)

1. G. Leftheriotis, S. Papaefthimiou, and P. Yianoulis, "Development of Multilayer Transparent Conductive Coatings," Solid State Ionics, 136-137, 655-61 (2000).
2. B. G. Lewis and D. C. Paine, "Applications and Processing of Transparent Conducting Oxides," MRS Bull., 25 [8] 22 (2000).
3. E. Kusano, J. Kawaguchi, and K. Enjoiji, "Thermal Stability of Heat-Reflective Films Consisting of Oxide-Ag-Oxide Deposited by dc Magnetron Sputtering," J. Vac. Sci. Technol., A4 [6] 2907 (1986).
4. M. Bender, W. Seelig, C. Daube, H. Franken berger, B. Ocker, and J. Stollenwerk, "Dependence of Film Composition and Thickness on Optical and Electrical Properties of ITO-Metal-ITO Multilayers," Thin Solid Films, 326, 67-71 (1998).
5. 2 Electrodes of Dye-Sensitized Solar Cells," Chem. Mater. C, (2003).
6. K. Meyer, I. K. Schuller, and C. M. Falco, "Thermalization of Sputtered Atoms," J. Appl. Phys., 52, 5803 (1981).
7. W. D. Westwood, "Calculation of Deposition Rates in Diode Sputtering System," J. Vac. Sci. Technol., 15, 1 (1978).
8. B. Chapman, Glow Discharge Processes (Chapter 5). John Wiley & Sons. Inc., New York, 1980.
9. D. L. Smith, Thin Film Deposition: Principle and Practice. McGraw-Hill Inc., New York, 1995.
10. W. F. Wu, B. S. Chiou, and S. T. Hsieh, "Effect of Sputtering Power on the Structure and Optical Properties of RF Magnetron Sputtered ITO Films," Sumicond. Sci. Technol., 9, 1242 (1994).
11. J.-M. Ting and B. S. Tsai, "DC Reactive Sputter Deposition of ZnO:Al Thin Film on Glass," MCP, 72, 273-7 (2001).
12. D. E. Clark, F. D. Gac, and W. H. Sutton, Microwaves: Theory and Application in Materials Processing, Ceramic Transactions, Vol. 21, The American Ceramic Society, Westerville, OH, 1991.
13. 2/Si Multilayers Prepared by Sputter Deposition," J. Mater. Sci. Lett., 22 [22] 1603-6 (2003).
14. F. Ng-Cheng-Chin, "On the Transmittance Properties of Electrolytically Deposited Thin Zinc Oxide Films," J. Phys. D: Appl. Phys., 31 [19] L71-L72 (1998).
15. E. J. J. Martin, M. Van, M. Lane, J. Ireland, C. R. Kannewurf, and R. P. H. Chang, "Properties of Multilayer Transparent Conducting Oxide Films," Thin Solid Films, 461, 309-15 (2004).
16. H. Kim, U. A. Pique, J. S. Horwitz, H. Murata, Z. H. Katafi, C. M. Gilmore, and D. B. Chrisey, "Effect of Aluminum Doping on Zinc Oxide Thin Films Grown by Pulsed Laser Deposition for Organic Light-Emitting Devices," Thin Solid Films, 377-378, 798-802 (2000).
17. H. Kim, C. M. Gilmore, J. S. Horwitz, A. Pique, H. Murata, G. P. Kushto, R. Schlaf, Z. H. Kafafi. and D. B. Chrisey, "Transparent Conducting Aluminum-Doped Zinc Oxide Thin Films for Organic Light-Emitting Devices," Appl. Phys. Lett., 76 [3] 259-61 (2000).
18. S. J. Jung, Y. H. Han, B. M. Koo, J. J. Lee, and J. H. Joo, "Low Temperature Deposition of Al-Doped Zinc Oxide Films by ICP-Assisted Reactive DC Magnetron Sputtering," Thin Solid Films, 475, 275-8 (2005).
19. X. H. Yu, J. Ma, F. Ji, Y. H. Wang, X. J. Zhang, and H. L. Ma, "Influence of Annealing on the Properties of ZnO: Ga Films Prepared by Radio Frequency Magnetron Sputtering," Thin Solid Films, 483 [1-2] 296-300 (2005).
20. V. Bhosle, A. Tiwari, and J. Narayan, "Metallic Conductivity and Metal-Semiconductor Transition in Ga-Doped ZnO," Appl. Phys. Lett., 88, 032106 (2006).
21. M. A. Lucio-Lopez, M. A. Luna-Arias, A. Maldonado, M. de la, L. Olvera, and D. R. Acost. "Preparation of Conducting and Transparent Indium-Doped ZnO Thin Films by Chemical Spray," Solar Energy Mater. Solar Cells, 90, 733-41 (2006).