Microstructure of ZnO/Cu/TaN/SiO2/Si multilayers prepared by sputter deposition

Journal of Materials Science Letters

Volumn 22, Issue 22, 2003, Pages 1603-1606

  Wu, Wan Yu ^a   Ting, Jyh Ming ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; GRAIN SIZE AND SHAPE; MICROSTRUCTURE; MULTILAYERS; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

IONIZATION ENERGY;

ZINC OXIDE;

EID: 0242578177     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1026340625900     Document Type: Article

References (23)

1. KOIKE JUN, Jpn. J. Appl. Phys. 32 (1993) 2337.
2. T. YAMAMOTO, J. Appl. Phys. 51 (1980) 3113.
3. J. M. HAMMER, Appl. Phys. Lett. 21 (1971) 358.
4. B. T. KHURI-YAKUB, ibid. 25 (1974) 188.
5. J. D. LARSION, IEEE Trans, Sonics, Ultrasonics US-19 (1972) 18.
6. T. HATA, Jpn. J. Appl. Phys. Suppl. 18 (1979) 219.
7. YOON KI HYUN, Thin Solid Films 302 (1997) 116.
8. T. SHIOSAKI, J. Appl. Phys. 50 (1979) 3113.
9. S. HAYAMIZU, ibid. 80 (1996) 787.
10. M. MACHIDA, IECE Japan 562-C (1979) 358.
11. M. SHIMIZU, J. Crystal Growth 52 (1982) 94.
12. M. F. OGAWA, J. Mater. Sci. Lett. 9 (1990) 1351.
13. S. MAJOR, Thin Solid Film 108 (1983) 333.
14. S. A. ARANOVICH, J. Appl. Phys. 51 (1980) 4260.
15. T. OKAMURA, Jpn. J. Appl. Phys. 31 (1992) L762.
16. N. J. IANNO, Thin Solid Film 220 (1992) 92.
17. P. SHYAM, Crit. Rev. in Solid State and Mater. Sci. 202(2) (1995) 87.
18. JIAN LI, IEEE, June 11-12, 1991 VMIC Conference 153.
19. H. MIYAZAKI, Jpn. J. Appl. Phys. 48 (1978) 329.
20. N. FUJIMURA, J. Cryst. Growth 130 (1993) 269.
21. W. T. CHIOU, WAN-YU WU and JYH-MING TING, submitted to Diamond and Related Materials, August, 2002.
22. C. KITTEL, "Introduction to Solid State Physics" Chapt. 3, 7th ed. (1996).
23. C. R. AITA, A. J. PURDES, R. J. LAD and P. D. FUNKENBUSCH, J. Appl. Phys. 51 (1980) 5533.