Lithium phosphorous oxynitride films synthesized by a plasma-assisted directed vapor deposition approach

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 1, 2008, Pages 174-183

  Kim, Yoon Gu ^a   Wadley, H N G ^a  

^a University of Virginia   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON PLASMA; ELECTROLYTE FILMS; LITHIUM PHOSPHOROUS OXYNITRIDE (LIPON); PORE MORPHOLOGY;

CATHODES; ELECTROLYTES; HELIUM; LITHIUM COMPOUNDS; MORPHOLOGY; SUPERSONIC FLOW; VAPOR DEPOSITION;

THIN FILMS;

EID: 37849053130     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2823491     Document Type: Article

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