Novel vapor phase processing for high performance coatings

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2001, Pages 99-104

  Groves, J F ^a   Marciano, Y ^a   Hass, D D ^a   Mattausch, G ^a   Morgner, H ^a   Wadley, H N G ^a  

^a UNIVERSITY OF VIRGINIA   (United States)

Author keywords

Coating technology; Directed vapor deposition (DVD); Electron beam evaporation; Physical vapor deposition (PVD)

Indexed keywords

ELECTRON BEAMS; PHYSICAL VAPOR DEPOSITION; PLASMA APPLICATIONS; SUBSTRATES; THIN FILMS;

DIRECTED VAPOR DEPOSITION (DVD);

COATINGS;

EID: 0035208884     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Directed vapour deposition
2. A novel EB evaporation tool for directed vapor deposition
3. Directed vapor deposition: Low vacuum materials processing technology
4. Reactive vapor deposition of metal oxide coatings
5. Plasma-activation for directed vapor deposition - A new application for hollow cathode arc plasma