PVD coating of plastic webs and sheets with high rates on large areas

Surface and Coatings Technology

Volumn 125, Issue 1-3, 2000, Pages 354-360

  Schiller, S ^a   Kirchhoff, V ^a   Schiller, N ^a   Morgner, H ^a  

^a Fraunhofer Institute for Electron Beam and Plasma Technology   (Germany)

Author keywords

Coating on plastics; Dual magnetron sputtering system (DMS); Hollow cathode activated deposition process (HAD); Large area deposition; Pulsed magnetron sputtering (PMS) process

Indexed keywords

COSTS; DEPOSITION; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; OXIDES; PLASTIC SHEETS; WEAR RESISTANCE;

DUAL MAGNETRON SPUTTERING (DMS) SYSTEM; HOLLOW CATHODE ACTIVATED DEPOSITION (HAD) PROCESS; PHYSICAL VAPOR DEPOSITION (PVD); PULSED MAGNETRON SPUTTERING (PMS) PROCESS;

PROTECTIVE COATINGS;

EID: 0033874947     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00613-1     Document Type: Article

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