Scanning electron microscope for in situ study of crystallization of Ge2 Sb2 Te5 in phase-change memory

Review of Scientific Instruments

Volumn 78, Issue 12, 2007, Pages

  Yin, You ^a   Niida, Daisuke ^a   Ota, Kazuhiro ^a   Sone, Hayato ^a   Hosaka, Sumio ^a  

^a GUNMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; GRAIN GROWTH; PHASE CHANGE MATERIALS; PHASE CHANGE MEMORY; PULSE AMPLITUDE MODULATION; SCANNING ELECTRON MICROSCOPY;

DEVICE RESISTANCE; ELECTRICAL CONNECTIONS; VOLTAGE PULSE;

GERMANIUM COMPOUNDS;

EID: 37649009525     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2818804     Document Type: Article

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