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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 12, 2007, Pages 7816-7823

Comparison of film properties between hydrogenated and unhydrogenated diamond-like carbon films prepared by radio-frequency magnetron sputtering

(3) Nakazawa, Hideki a Kudo, Masahiro a Mashita, Masao a

a HIROSAKI UNIVERSITY (Japan)

Author keywords

Diamond like carbon; Hydrogen; Mechanical and tribological properties; Raman spectroscopy; Sputtering; X ray photoelectron spectroscopy

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; TRIBOLOGY; ULTRAVIOLET PHOTOELECTRON SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

HYDROGENATED FILMS; RADIO-FREQUENCY MAGNETRON SPUTTERING; UNHYDROGENATED FILMS;

DIAMOND LIKE CARBON FILMS;

EID: 37549051310 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.46.7816 Document Type: Article

Times cited : (5)

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