Effect of source gas chemistry on tribological performance of diamond-like carbon films

Diamond and Related Materials

Volumn 9, Issue 3-6, 2000, Pages 632-637

  Erdemir, A ^a   Eryilmaz, O L ^a,b   Nilufer, I B ^a,b   Fenske, G R ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b ISTANBUL TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Diamond like carbon; Source gas chemistry; Super low friction and wear

Indexed keywords

ACETYLENE; CARBON; ETHANE; ETHYLENE; FRICTION; HYDROGEN; METHANE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE CHEMISTRY; TRIBOLOGY; WEAR OF MATERIALS;

DIAMOND-LIKE CARBON (DLC) FILMS;

AMORPHOUS FILMS;

DIAMOND-LIKE CARBON; FILM; FRICTION; GAS; TRIBOLOGY;

EID: 0034049732     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00361-1     Document Type: Conference Paper

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