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Volumn 29, Issue 1, 2008, Pages 83-85

High voltage (3130 V) 4H-SiC lateral p-n diodes on a semiinsulating substrate

Author keywords

4H SiC; Diode; High voltage; Lateral; Semiinsulating Substrate; Superjunction

Indexed keywords

ANODES; ELECTRIC POTENTIAL; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR JUNCTIONS; SUBSTRATES;

EID: 37549002068     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2007.910756     Document Type: Article
Times cited : (11)

References (12)
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    • J. A. Cooper, Jr. and A. Agarwal, "SiC power-switching devices-the second electronics revolution?" Proc. IEEE, vol. 90, no. 6, pp. 956-968, Jun. 2002
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    • Cooper Jr., J.A.1    Agarwal, A.2
  • 3
    • 34247873095 scopus 로고    scopus 로고
    • 4H-SiC lateral double RESERF MOSFETs with low on resistance
    • May
    • M. Noborio, J. Suda, and T. Kimoto, "4H-SiC lateral double RESERF MOSFETs with low on resistance," IEEE Trans. Electron Devices, vol. 54, no. 5, pp. 1216-1222, May 2007.
    • (2007) IEEE Trans. Electron Devices , vol.54 , Issue.5 , pp. 1216-1222
    • Noborio, M.1    Suda, J.2    Kimoto, T.3
  • 4
    • 12344276948 scopus 로고    scopus 로고
    • Design and fabrication of RESURF MOSFETs on 4H-SiC(000l), (1120), and 6H-SiC(000l)
    • Jan
    • T. Kimoto, H. Kosugi, J. Suda, Y. Kanzaki, and H. Matsunami, "Design and fabrication of RESURF MOSFETs on 4H-SiC(000l), (1120), and 6H-SiC(000l)," IEEE Trans. Electron Devices, vol. 52, no. 1, pp. 112-117, Jan. 2005.
    • (2005) IEEE Trans. Electron Devices , vol.52 , Issue.1 , pp. 112-117
    • Kimoto, T.1    Kosugi, H.2    Suda, J.3    Kanzaki, Y.4    Matsunami, H.5
  • 8
    • 0043246753 scopus 로고    scopus 로고
    • Fabrication of SiC lateral super junction diodes with multiple stacking p-and n-layers
    • May
    • M. Miura, S. Nakamura, J. Suda, T. Kimoto, and H. Matsunami, "Fabrication of SiC lateral super junction diodes with multiple stacking p-and n-layers," IEEE Electron Device Lett., vol. 24, no. 5, pp. 321-323, May 2003.
    • (2003) IEEE Electron Device Lett , vol.24 , Issue.5 , pp. 321-323
    • Miura, M.1    Nakamura, S.2    Suda, J.3    Kimoto, T.4    Matsunami, H.5
  • 9
    • 0018714042 scopus 로고
    • High voltage thin layer devices (RESURF devices)
    • J. A. Appels and H. M. J. Vas, "High voltage thin layer devices (RESURF devices)," in IEDM Tech. Dig., 1979, pp. 238-241.
    • (1979) IEDM Tech. Dig , pp. 238-241
    • Appels, J.A.1    Vas, H.M.J.2
  • 10
    • 0031251517 scopus 로고    scopus 로고
    • Theory of semiconductor superjunction devices
    • T. Fujihira, "Theory of semiconductor superjunction devices," Jpn. J. Appl. Phys., vol. 36, no. 10, pp. 6254-6262, 1997.
    • (1997) Jpn. J. Appl. Phys , vol.36 , Issue.10 , pp. 6254-6262
    • Fujihira, T.1
  • 11
    • 1342283833 scopus 로고    scopus 로고
    • Carrier lifetime in conductive and vanadium-doped 6H-SiC substrates
    • Jan
    • G. Tamulaitis, I. Yilmaz, M. Shur, T. Anderson, and R. Gaska, "Carrier lifetime in conductive and vanadium-doped 6H-SiC substrates," Appl. Phys. Lett., vol. 84, no. 3, pp. 335-337, Jan. 2004.
    • (2004) Appl. Phys. Lett , vol.84 , Issue.3 , pp. 335-337
    • Tamulaitis, G.1    Yilmaz, I.2    Shur, M.3    Anderson, T.4    Gaska, R.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.