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Applied Physics B: Lasers and Optics

Volumn 90, Issue 1, 2008, Pages 155-162

An inverse problem of estimating the Biot number in deep X-ray lithography

(4) Chang, W J a Chen, W L a Yang, Y C a Lee, H L a

a KUN SHAN UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; FUNCTION EVALUATION; INVERSE PROBLEMS; TEMPERATURE MEASUREMENT;

BIOT NUMBER; FUNCTIONAL FORMS;

X RAY LITHOGRAPHY;

EID: 37449005550 PISSN: 09462171 EISSN: None Source Type: Journal
DOI: 10.1007/s00340-007-2845-x Document Type: Article

Times cited : (3)

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