Tribological property enhancement of CrN films by metal vapor vacuum arc implantation of Vanadium and Carbon ions

Thin Solid Films

Volumn 516, Issue 6, 2008, Pages 1012-1019

  Weng, Ko Wei ^a   Lin, Tai Nan ^b   Wang, Da Yung ^a  

^a MINGDAO UNIVERSITY   (Taiwan)

^b INSTITUTE OF NUCLEAR ENERGY RESEARCH   (Taiwan)

Author keywords

Chromium nitride; Filtered arc deposition; Metal vapor vacuum arc

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; OXIDATION; SUBSTRATES; TRIBOLOGY; VANADIUM; X RAY PHOTOELECTRON SPECTROSCOPY;

CHROMIUM NITRIDE; FILTERED ARC DEPOSITION; METAL VAPOR VACUUM ARC;

CHROMIUM COMPOUNDS;

EID: 37349115339     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.162     Document Type: Article

References (21)

1. Lévy F., Hones P., Schmid P.E., Sanjinés R., Diserens M., and Wiemer C. Surf. Coat. Technol. 120/121 (1999) 284
2. Brown I.G., Godechot X., and Yu K.M. Appl. Phys. Lett. 58 (1991) 1392
3. Brown I.G. Rev. Sci. Instrum. 65 (1994) 3061
4. Brown I.G., Anders A., Anders S., Dickinson M.R., MacGill R.A., and Oks E.M. Surf. Coat. Technol. 84 (1996) 550
5. Yi Z., Xiao Z., Ma F., Zhang T., and Li Y. Surf. Coat. Technol. 128/129 (2000) 186
6. Stachowiak G.B., Stachowiak G.W., and Evans P. Wear 241 (2000) 220
7. Zhang T., Wang X., Liang H., Zhang H., Zhou G., and Sun G. Surf. Coat. Technol. 83 (1996) 280
8. Zhang T., Xie J., Ji C., Chen J., and Xu H. Surf. Coat. Technol. 72 (1995) 93
9. Han S., Chen H.Y., Chang K.L., Weng K.W., Wang D.Y., Lu F.H., and Shih H.C. Thin Solid Films 447 (2004) 425
10. Lin C.C., Hsieh W.J., Lin J.H., Chen U.S., Guo X.J., and Shih H.C. Surf. Coat. Technol. 200 (2006) 5052
11. Purushotham K.P., Ward L.P., Brack N., Pigram P.J., Evans P., Noorman H., and Manory R.R. Wear 257 (2004) 901
12. Chen H.Y., Han S., and Shih H.C. Mater. Lett. 58 (2004) 2924
13. Shum P.W., Li K.Y., and Shen Y.G. Surf. Coat. Technol. 198 (2005) 414
14. Dai Z.N., Miyashita A., and Yamamoto S. Thin Solid Films 347 (1999) 117
15. Sanjines R., Hones P., and Lévy F. Thin Solid Films 332 (1998) 225
16. Galesic I., and Kolbesen B.O. Thin Solid Films 349 (1999) 14
17. Wang D.Y., and Weng K.W. Surf. Coat. Technol. 156 (2002) 195
18. Ma C.H., Huang J.H., and Chen H. Thin Solid Films 418 (2002) 73
19. Silversmit G., Depla D., Poelman H., Marin G.B., and Gryse R.D. Surf. Sci. 600 (2006) 3512
20. Wong G.S., and Vohs J.M. Surf. Sci. 498 (2002) 266
21. Haasch R.T., Lee T.Y., Gall D., Shin C.S., Greene J.E., and Petrov I. Surf. Sci. Spectra 7 221 (2000)