Direct bonding and beyond

Applied Optics

Volumn 46, Issue 27, 2007, Pages 6793-6803

  Haisma, Jan ^a   Hattu, Nico ^a   Pultes, J T C M ^a   Steding, Esther ^a   Vervest, Jan C G ^a  

^a Louwers Glass and Ceramics Technologies   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL GEOMETRY; GLUES; LITHOGRAPHY; SEMICONDUCTOR QUANTUM DOTS; SILICON ON INSULATOR TECHNOLOGY; ULTRAVIOLET RADIATION;

GEOMETRIC SHAPE; GLASS WAFERS; GLUELESS BONDING;

BONDING;

EID: 36949028519     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.006793     Document Type: Article

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