Nanoimprint lithography combined with direct bonding: A possibility to construct quantum dots, wires, and planes in vertical cascade

Applied Physics Letters

Volumn 89, Issue 24, 2006, Pages

  Haisma, Jan ^a,b  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b NONE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

FUNCTION EVALUATION; LITHOGRAPHY; SEMICONDUCTOR QUANTUM DOTS; SEMICONDUCTOR QUANTUM WIRES;

MEMORY INTERPLAY FUNCTIONS; NANOIMPRINT LITHOGRAPHY; QUANTUM ELEMENTS; SEMICONDUCTOR TECHNOLOGIES;

NANOSTRUCTURED MATERIALS;

EID: 33845792490     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2403932     Document Type: Article

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