Catalytic CVD processes of oxidizing species and the prevention of oxidization of heated tungsten filaments by H2

Thin Solid Films

Volumn 516, Issue 5, 2008, Pages 829-831

  Umemoto, Hironobu ^a   Ansari, S G ^b   Morimoto, Takashi ^b   Setoguchi, Shota ^b   Uemura, Hitoshi ^b   Matsumura, Hideki ^b  

^a SHIZUOKA UNIVERSITY   (Japan)

^b JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Cat CVD; Catalytic chemical vapor deposition; Hot Wire CVD; Oxidization; Oxygen; SiOxNy

Indexed keywords

AMMONIA; CATALYSIS; CHEMICAL VAPOR DEPOSITION; HYDROGEN; NITROGEN OXIDES; OXIDATION; SILICA;

CATALYTIC CHEMICAL VAPOR DEPOSITION; CATALYZERS; OXIDIZING SPECIES; TUNGSTEN FILAMENTS;

TUNGSTEN;

EID: 36849072495     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.041     Document Type: Article

References (17)

1. Ogita Y., Iehara S., and Tomita T. Thin Solid Films 430 (2003) 161
2. Ogita Y., and Tomita T. Thin Solid Films 501 (2006) 39
3. Saito K., Uchiyama Y., and Abe K. Thin Solid Films 430 (2003) 287
4. Ogita Y., and Tomita T. Thin Solid Films 501 (2006) 35
5. Izumi A. Thin Solid Films 395 (2001) 260
6. Matsumoto Y., Ortega M., Peza J.-M., Reyes M.-A., and Escobosa A. Thin Solid Films 490 (2005) 173
7. Matsumoto Y. Thin Solid Films 501 (2006) 95
8. Y. Matsumoto, private communication.
9. Matsumura H. Jpn. J. Appl. Phys., Part 1 37 (1998) 3175
10. Ogawa Y., Ohdaira K., Oyaidu T., and Matsumura H. Extended Abstracts (4th International Conference on Hot-Wire CVD (Cat-CVD) Process) (2006) 240
11. Nozaki Y., Kongo K., Miyazaki T., Kitazoe M., Horii K., Umemoto H., Masuda A., and Matsumura H. J. Appl. Phys. 88 (2000) 5437
12. Umemoto H., Morimoto T., Yamawaki M., Masuda Y., Masuda A., and Matsumura H. Thin Solid Films 430 (2003) 24
13. Ansari S.G., Umemoto H., Morimoto T., Yoneyama K., Izumi A., Masuda A., and Matsumura H. Thin Solid Films 501 (2006) 31
14. Arthur N.L., and Miles L.A. Chem. Phys. Lett. 282 (1998) 192
15. Nozaki Y., Kitazoe M., Horii K., Umemoto H., Masuda A., and Matsumura H. Thin Solid Films 395 (2001) 47
16. Koshi M., Nishida N., Murakami Y., and Matsui H. J. Phys. Chem. 97 (1993) 4473
17. Murakami Y., Koshi M., Matsui H., Kamiya K., and Umeyama H. J. Phys. Chem. 100 (1996) 17501