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Volumn 30, Issue 4, 2007, Pages 781-786

A low cost bumping method for flip chip assembly and MEMS integration

Author keywords

Bumping; Flexible carrier; Flip chip; Microelectromechanical systems (MEMS)

Indexed keywords

FLIP CHIP DEVICES; MEMS; METAL MELTING; SOLDERING; THERMAL CYCLING;

EID: 36849038911     PISSN: 15213331     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCAPT.2007.906302     Document Type: Article
Times cited : (7)

References (10)
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    • Wang, C.H.1    Holmes, A.S.2
  • 4
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    • High aspect ratio UV photolithography for electroplated structures
    • S. Roth, L. Dellmann, G. -A. Racine, and N. F. de Rooij, "High aspect ratio UV photolithography for electroplated structures," J. Micromech. Microeng., vol. 9, no. 2, pp. 105-108, 1999.
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    • Roth, S.1    Dellmann, L.2    Racine, G.-A.3    de Rooij, N.F.4
  • 5
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    • Metallic microstructures fabricated using photosensitive polyimide electroplating methods
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    • (1993) J. Microelectromech. Syst , vol.2 , pp. 87-94
    • Frazier, A.B.1    Allen, M.G.2
  • 6
    • 0004638485 scopus 로고    scopus 로고
    • Wire interconnect technology - An ultra-high-density flip chip-substrate connection method
    • J. H. Lau, Ed. New York: McGraw-Hill
    • L. Moresco, D. G. Love, B. Chou, and V. Holalkers, "Wire interconnect technology - An ultra-high-density flip chip-substrate connection method," in Flip Chip Technologies, J. H. Lau, Ed. New York: McGraw-Hill, 1996, pp. 367-385.
    • (1996) Flip Chip Technologies , pp. 367-385
    • Moresco, L.1    Love, D.G.2    Chou, B.3    Holalkers, V.4
  • 7
    • 0033138327 scopus 로고    scopus 로고
    • Potentialities of a new positive photoresist for the realization of thick moulds
    • V. Conédéra, "Potentialities of a new positive photoresist for the realization of thick moulds," J. Micromech. Microeng., vol. 9, no. 2, pp. 173-175, 1999.
    • (1999) J. Micromech. Microeng , vol.9 , Issue.2 , pp. 173-175
    • Conédéra, V.1
  • 8
    • 0033355776 scopus 로고    scopus 로고
    • Electroless remetallization of aluminium bond pads on CMOS driver chip for flip-chip attachment to vertical cavity surface emitting lasers (VCSEL's)
    • Jun
    • M. Datta, S. A. Merritt, and M. Dagenais, "Electroless remetallization of aluminium bond pads on CMOS driver chip for flip-chip attachment to vertical cavity surface emitting lasers (VCSEL's)," IEEE Trans. Compon. Packag. Technol., vol. 22, no. 2, pp. 299-306, Jun. 1999.
    • (1999) IEEE Trans. Compon. Packag. Technol , vol.22 , Issue.2 , pp. 299-306
    • Datta, M.1    Merritt, S.A.2    Dagenais, M.3
  • 9
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    • Zincating morphology of aluminium bond pad: Its influence on quality of electroless nickel bumping
    • G. Qi, L. G. J. Fokkink, and K. H. Chew, "Zincating morphology of aluminium bond pad: Its influence on quality of electroless nickel bumping," Thin Solid Films, vol. 406, pp. 219-223, 2002.
    • (2002) Thin Solid Films , vol.406 , pp. 219-223
    • Qi, G.1    Fokkink, L.G.J.2    Chew, K.H.3
  • 10
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    • Influence of bath chemistry on zincate morphology on aluminium bond pad
    • G. Qi, X. Chen, and Z. Shao, "Influence of bath chemistry on zincate morphology on aluminium bond pad," Thin Solid Films, vol. 406, pp. 204-209, 2002.
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.