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Volumn 34, Issue 3 PART 2, 2006, Pages 767-785

Self-consistent modeling of nonlocal inductively coupled plasmas

Author keywords

Anomalous heating; Collisionless heating; Plasma discharges; Stochastic heating

Indexed keywords

ANOMALOUS HEATING; COLLISIONLESS HEATING; DENSITY PROFILES; DISCHARGE CHARACTERISTICS; ELECTRON-ENERGY DISTRIBUTION FUNCTIONS; EXTERNAL MAGNETIC FIELDS; FINITE SIZES; INDUCTIVELY COUPLED DISCHARGES; NON LOCALS; ONE-DIMENSIONAL; PLASMA CONDUCTIVITIES; PLASMA DISCHARGES; PLASMA NONUNIFORMITY; PLASMA PROPERTIES; RADIO-FREQUENCY DISCHARGES; SELF-CONSISTENT MODELING; STOCHASTIC HEATING;

EID: 34547360957     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2006.875733     Document Type: Conference Paper
Times cited : (15)

References (40)
  • 3
    • 0347657369 scopus 로고    scopus 로고
    • Plasma phenomena in inductive discharges
    • V. A. Godyak, "Plasma phenomena in inductive discharges," Plasma Phys. Control. Fusion, vol. 45, p. A399, 2003.
    • (2003) Plasma Phys. Control. Fusion , vol.45
    • Godyak, V.A.1
  • 4
    • 0032095926 scopus 로고    scopus 로고
    • From Fermi acceleration to collisionless discharge heating
    • Jun
    • M. A. Lieberman and V. A. Godyak, "From Fermi acceleration to collisionless discharge heating," IEEE Trans. Plasma Sci., vol. 26, pp. 955-986, Jun. 1998.
    • (1998) IEEE Trans. Plasma Sci , vol.26 , pp. 955-986
    • Lieberman, M.A.1    Godyak, V.A.2
  • 5
    • 0031144474 scopus 로고    scopus 로고
    • The anomalous skin effect in gas discharge plasmas
    • V. I. Kolobov and D. J. Economou, "The anomalous skin effect in gas discharge plasmas," Plasma Sources Sci. Technol., vol. 6, p. 1, 1997.
    • (1997) Plasma Sources Sci. Technol , vol.6 , pp. 1
    • Kolobov, V.I.1    Economou, D.J.2
  • 6
    • 24344485626 scopus 로고    scopus 로고
    • Enhanced collisionless heating in a nonuniform plasma at the bounce resonance condition
    • O. V. Polomarov, C. E. Theodosiou, and I. D. Kaganovich, "Enhanced collisionless heating in a nonuniform plasma at the bounce resonance condition," Phys. Plasmas, vol. 12, p. 080704, 2005.
    • (2005) Phys. Plasmas , vol.12 , pp. 080704
    • Polomarov, O.V.1    Theodosiou, C.E.2    Kaganovich, I.D.3
  • 7
    • 2942511683 scopus 로고    scopus 로고
    • Landau damping and anomalous skin effect in low-pressure gas discharges: Self-consistent treatment of collisionless heating
    • I. D. Kaganovich, O. V. Polomarov, and C. E. Theodosiou, "Landau damping and anomalous skin effect in low-pressure gas discharges: Self-consistent treatment of collisionless heating," Phys. Plasmas vol. 11, no. 5, p. 2399, 2004.
    • (2004) Phys. Plasmas , vol.11 , Issue.5 , pp. 2399
    • Kaganovich, I.D.1    Polomarov, O.V.2    Theodosiou, C.E.3
  • 8
    • 3142777737 scopus 로고    scopus 로고
    • Plasma and electrical characteristics of inductive discharge in a magnetic field
    • V. A. Godyak and B. M. Alexandrovich, "Plasma and electrical characteristics of inductive discharge in a magnetic field," Phys. Plasmas, vol. 11, p. 3553, 2004.
    • (2004) Phys. Plasmas , vol.11 , pp. 3553
    • Godyak, V.A.1    Alexandrovich, B.M.2
  • 9
    • 36149011770 scopus 로고
    • Wave Propagation along a Magnetic Field in a Warm Plasma
    • P. M. Platzman and S. J. Buchsbaum, "Wave Propagation along a Magnetic Field in a Warm Plasma," Phys. Rev., vol. 123, p. 1004, 1962.
    • (1962) Phys. Rev , vol.123 , pp. 1004
    • Platzman, P.M.1    Buchsbaum, S.J.2
  • 10
    • 6544258644 scopus 로고
    • Transmission of Electromagnetic Waves through a Conducting Slab. II. The Peak at Cyclotron Resonance
    • G. A. Baraff, "Transmission of Electromagnetic Waves through a Conducting Slab. II. The Peak at Cyclotron Resonance," Phys. Rev. vol. 167, p. 625, 1968.
    • (1968) Phys. Rev , vol.167 , pp. 625
    • Baraff, G.A.1
  • 11
    • 0030205216 scopus 로고    scopus 로고
    • The effects of magnetic fields on a planar inductively coupled argon plasma
    • H.-J. Lee, I.-D. Yang, and K.-W. Whang, "The effects of magnetic fields on a planar inductively coupled argon plasma," Plasma Sources Sci. Technol., vol. 5, p. 383, 1996.
    • (1996) Plasma Sources Sci. Technol , vol.5 , pp. 383
    • Lee, H.-J.1    Yang, I.-D.2    Whang, K.-W.3
  • 12
    • 0032621661 scopus 로고    scopus 로고
    • Inductively coupled plasma heating in a weakly magnetized plasma
    • S. S. Kim, C. S. Chang, N. S. Yoon, and K. W. Whang, "Inductively coupled plasma heating in a weakly magnetized plasma," Phys. Plasmas vol. 6, p. 2926, 1999.
    • (1999) Phys. Plasmas , vol.6 , pp. 2926
    • Kim, S.S.1    Chang, C.S.2    Yoon, N.S.3    Whang, K.W.4
  • 13
    • 0031231742 scopus 로고    scopus 로고
    • Collisionless electron heating in inductively coupled discharges
    • K. C. Shaing and A. Y. Aydemir, "Collisionless electron heating in inductively coupled discharges," Phys. Plasmas, vol. 4, p. 3163, 1997.
    • (1997) Phys. Plasmas , vol.4 , pp. 3163
    • Shaing, K.C.1    Aydemir, A.Y.2
  • 14
    • 0038059672 scopus 로고    scopus 로고
    • The electron bounce resonance in a low-pressure solenoidal inductive discharge
    • C. W. Chung, K.-I. You, S. H. Seo, S. S. Kim, and H. Y. Chang, "The electron bounce resonance in a low-pressure solenoidal inductive discharge," Phys. Plasmas, vol. 8, p. 2992, 2001.
    • (2001) Phys. Plasmas , vol.8 , pp. 2992
    • Chung, C.W.1    You, K.-I.2    Seo, S.H.3    Kim, S.S.4    Chang, H.Y.5
  • 15
    • 0005542274 scopus 로고    scopus 로고
    • The finite size effect in a planar inductively coupled plasma
    • C. W. Chung, S. S. Kim, S. H. Seo, and H. Y. Chang, "The finite size effect in a planar inductively coupled plasma," J. Appl. Phys., vol. 88, p. 1181, 2000.
    • (2000) J. Appl. Phys , vol.88 , pp. 1181
    • Chung, C.W.1    Kim, S.S.2    Seo, S.H.3    Chang, H.Y.4
  • 16
    • 0031560345 scopus 로고    scopus 로고
    • Negative Power Absorption in Inductively Coupled Plasma
    • V. A. Godyak and V. I. Kolobov, "Negative Power Absorption in Inductively Coupled Plasma," Phys. Rev. Lett., vol. 79, p. 4589, 1997.
    • (1997) Phys. Rev. Lett , vol.79 , pp. 4589
    • Godyak, V.A.1    Kolobov, V.I.2
  • 17
    • 0032514087 scopus 로고    scopus 로고
    • Effect of Collisionless Heating on Electron Energy Distribution in an Inductively Coupled Plasma
    • V. A. Godyak and V. I. Kolobov, "Effect of Collisionless Heating on Electron Energy Distribution in an Inductively Coupled Plasma," Phys. Rev. Lett., vol. 81, p. 369, 1998.
    • (1998) Phys. Rev. Lett , vol.81 , pp. 369
    • Godyak, V.A.1    Kolobov, V.I.2
  • 18
    • 0042267369 scopus 로고    scopus 로고
    • Reduction of Electron Heating in the Low-Frequency Anomalous-Skin-Effect Regime
    • Y. O. Tyshetskiy, A. I. Smolyakov, and V. A. Godyak, "Reduction of Electron Heating in the Low-Frequency Anomalous-Skin-Effect Regime," Phys. Rev. Lett., vol. 90, p. 255002, 2003.
    • (2003) Phys. Rev. Lett , vol.90 , pp. 255002
    • Tyshetskiy, Y.O.1    Smolyakov, A.I.2    Godyak, V.A.3
  • 19
    • 0345440137 scopus 로고    scopus 로고
    • Spatial profiles of a planar inductively coupled discharge in argon
    • G. Mumken, "Spatial profiles of a planar inductively coupled discharge in argon," J. Phys. D, Appl. Phys., vol. 32, p. 804, 1999.
    • (1999) J. Phys. D, Appl. Phys , vol.32 , pp. 804
    • Mumken, G.1
  • 20
    • 0032141909 scopus 로고    scopus 로고
    • Fast modeling of low pressure radio-frequency collisional capacitively coupled discharge and investigation of nonMaxwellian electron distribution function
    • S. V. Berezhnoi, I. D. Kaganovich, and L. D. Tsendin, "Fast modeling of low pressure radio-frequency collisional capacitively coupled discharge and investigation of nonMaxwellian electron distribution function," Plasma Sources Sci. Technol., vol. 7, p. 268, 1998.
    • (1998) Plasma Sources Sci. Technol , vol.7 , pp. 268
    • Berezhnoi, S.V.1    Kaganovich, I.D.2    Tsendin, L.D.3
  • 21
    • 0001151473 scopus 로고    scopus 로고
    • Stochastic electron heating in bounded radio-frequency plasmas
    • I. D. Kaganovich, V. I. Kolobov, and L. D. Tsendin, "Stochastic electron heating in bounded radio-frequency plasmas," Appl. Phys. Lett., vol. 69, p. 3818, 1996.
    • (1996) Appl. Phys. Lett , vol.69 , pp. 3818
    • Kaganovich, I.D.1    Kolobov, V.I.2    Tsendin, L.D.3
  • 22
    • 0000677508 scopus 로고    scopus 로고
    • Collisionless electron heating in RF gas discharges. I. Quasilinear theory
    • Y. M. Aliev, I. D. Kaganovich, and H. Schluter, "Collisionless electron heating in RF gas discharges. I. Quasilinear theory," Phys. Plasmas vol. 4, p. 2413, 1997.
    • (1997) Phys. Plasmas , vol.4 , pp. 2413
    • Aliev, Y.M.1    Kaganovich, I.D.2    Schluter, H.3
  • 23
    • 2942519454 scopus 로고    scopus 로고
    • Collisionless electron heating in RF gas discharges. II. Role of collisions and nonlinear effects
    • Electron Kinetics and Applications of Glow Discharges, U. Korsthagen and L. Tsendin, Eds. New York: Plenum, Physics
    • U. Buddemeier and I. Kaganovich, "Collisionless electron heating in RF gas discharges. II. Role of collisions and nonlinear effects," in Electron Kinetics and Applications of Glow Discharges, ser. NATO ASI Series B, U. Korsthagen and L. Tsendin, Eds. New York: Plenum, 1998, vol. 367, Physics.
    • (1998) ser. NATO ASI Series B , vol.367
    • Buddemeier, U.1    Kaganovich, I.2
  • 24
    • 0001125546 scopus 로고    scopus 로고
    • Effects of Collisions and Particle Trapping on Collisionless Heating
    • I. D. Kaganovich, "Effects of Collisions and Particle Trapping on Collisionless Heating," Phys. Rev. Lett., vol. 82, p. 327, 1999.
    • (1999) Phys. Rev. Lett , vol.82 , pp. 327
    • Kaganovich, I.D.1
  • 25
    • 11544341327 scopus 로고
    • Experimental Observation of Bounce-Resonance Landau Damping in an Axisymmetric Mirror Plasma
    • M. Koepke, R. F. Ellis, R. P. Majeski, and M. J. McCarick, "Experimental Observation of Bounce-Resonance Landau Damping in an Axisymmetric Mirror Plasma," Phys. Rev. Lett., vol. 56, p. 1256, 1986.
    • (1986) Phys. Rev. Lett , vol.56 , pp. 1256
    • Koepke, M.1    Ellis, R.F.2    Majeski, R.P.3    McCarick, M.J.4
  • 26
    • 0000584324 scopus 로고    scopus 로고
    • Resonant Particle Heating of an Electron Plasma by Oscillating Sheaths
    • B. P. Cluggish, J. R. Danielson, and C. F. Driscoll, "Resonant Particle Heating of an Electron Plasma by Oscillating Sheaths," Phys. Rev. Lett., vol. 81, p. 353, 1998.
    • (1998) Phys. Rev. Lett , vol.81 , pp. 353
    • Cluggish, B.P.1    Danielson, J.R.2    Driscoll, C.F.3
  • 27
    • 22244482962 scopus 로고
    • Anomalous skin effect in a cylindrical conductor located in a magnetic field
    • B. E. Meierovich, "Anomalous skin effect in a cylindrical conductor located in a magnetic field," Sov. Phys. JETP, vol. 31, p. 149, 1971.
    • (1971) Sov. Phys. JETP , vol.31 , pp. 149
    • Meierovich, B.E.1
  • 28
    • 36849042847 scopus 로고    scopus 로고
    • Self-consistent system of equations for a kinetic description of the low-pressure discharges accounting for the nonlocal and collisionless electron dynamics
    • I. D. Kaganovich and O. V. Polomarov, "Self-consistent system of equations for a kinetic description of the low-pressure discharges accounting for the nonlocal and collisionless electron dynamics," Phys. Rev. E, vol. 68, p. 026411, 2003.
    • (2003) Phys. Rev. E , vol.68 , pp. 026411
    • Kaganovich, I.D.1    Polomarov, O.V.2
  • 29
    • 0026847210 scopus 로고
    • The space-time-averaging procedure and modeling of the RF discharge II. Model of collisional low-pressure RF discharge
    • Apr
    • I. D. Kaganovich and L. D. Tsendin, "The space-time-averaging procedure and modeling of the RF discharge II. Model of collisional low-pressure RF discharge," IEEE Trans. Plasma Sci, vol. 20, no. 2, p. 66, Apr. 1992.
    • (1992) IEEE Trans. Plasma Sci , vol.20 , Issue.2 , pp. 66
    • Kaganovich, I.D.1    Tsendin, L.D.2
  • 30
    • 0038284003 scopus 로고    scopus 로고
    • Effects of nonlocal conductivity on power absorption and plasma density profiles for low pressure inductively coupled discharges
    • B. Ramamurthi, D. J. Economou, and I. D. Kaganovich, "Effects of nonlocal conductivity on power absorption and plasma density profiles for low pressure inductively coupled discharges," Plasma Sources Sci. Technol., vol. 11, p. 170, 2002.
    • (2002) Plasma Sources Sci. Technol , vol.11 , pp. 170
    • Ramamurthi, B.1    Economou, D.J.2    Kaganovich, I.D.3
  • 31
    • 3343015590 scopus 로고
    • Collisionless electron heating in an inductively coupled discharge
    • M. M. Turner, "Collisionless electron heating in an inductively coupled discharge," Phys. Rev. Lett., vol. 71, p. 1844, 1993.
    • (1993) Phys. Rev. Lett , vol.71 , pp. 1844
    • Turner, M.M.1
  • 32
    • 34247508068 scopus 로고    scopus 로고
    • Revisiting the anomalous RF field penetration into a warm plasma
    • Jun
    • I. D. Kaganovich, O. V. Polomarov, and C. E. Theodosiou, "Revisiting the anomalous RF field penetration into a warm plasma," IEEE Trans. Plasma Sci., vol. 34, no. 3, pp. 696-717, Jun. 2006.
    • (2006) IEEE Trans. Plasma Sci , vol.34 , Issue.3 , pp. 696-717
    • Kaganovich, I.D.1    Polomarov, O.V.2    Theodosiou, C.E.3
  • 33
    • 27644508653 scopus 로고    scopus 로고
    • Effectiveness of electron-cyclotron and transmission resonance heating in inductively coupled plasmas
    • O. V. Polomarov, C. E. Theodosiou, and I. D. Kaganovich, "Effectiveness of electron-cyclotron and transmission resonance heating in inductively coupled plasmas," Phys. Plasmas, vol. 12, p. 104505, 2005.
    • (2005) Phys. Plasmas , vol.12 , pp. 104505
    • Polomarov, O.V.1    Theodosiou, C.E.2    Kaganovich, I.D.3
  • 34
    • 0017531588 scopus 로고
    • Positive column of a lowdensity, low-pressure discharge. I. Electron energy distribution
    • L. D. Tsendin and Y. B. Golubovskii, "Positive column of a lowdensity, low-pressure discharge. I. Electron energy distribution," Sov. Phys. Tech. Phys., vol. 22, p. 1066, 1977.
    • (1977) Sov. Phys. Tech. Phys , vol.22 , pp. 1066
    • Tsendin, L.D.1    Golubovskii, Y.B.2
  • 35
    • 0000690636 scopus 로고
    • Nonlinear phenomena in a plasma located in an alternating electromagnetic field
    • V. L. Ginzburg and A. V. Gurevich, "Nonlinear phenomena in a plasma located in an alternating electromagnetic field," Sov. Phys. Usp. vol. 3, p. 115, 1960.
    • (1960) Sov. Phys. Usp , vol.3 , pp. 115
    • Ginzburg, V.L.1    Gurevich, A.V.2
  • 36
    • 0004325651 scopus 로고    scopus 로고
    • Electron Boltzmann kinetic equation averaged over fast electron bouncing and pitch-angle scattering for fast modeling of electron cyclotron resonance discharge
    • I. D. Kaganovich, M. Misina, R. Gijbels, and S. V. Berezhnoi, "Electron Boltzmann kinetic equation averaged over fast electron bouncing and pitch-angle scattering for fast modeling of electron cyclotron resonance discharge," Phys. Rev. E, vol. 61, p. 1875, 2000.
    • (2000) Phys. Rev. E , vol.61 , pp. 1875
    • Kaganovich, I.D.1    Misina, M.2    Gijbels, R.3    Berezhnoi, S.V.4
  • 37
    • 0004764917 scopus 로고    scopus 로고
    • Collisionless Electron Heating in RF Gas Discharges. I. Quasilinear Theory
    • Electron Kinetics and Applications of Glow Discharges, U. Korsthagen and L. Tsendin, Eds. New York: Plenum, Physics
    • Y. M. Aliev, I. D. Kaganovich, and H. Schluter, "Collisionless Electron Heating in RF Gas Discharges. I. Quasilinear Theory," in Electron Kinetics and Applications of Glow Discharges, ser. NATO ASI Series B, U. Korsthagen and L. Tsendin, Eds. New York: Plenum, 1998, vol. 367, Physics.
    • (1998) ser. NATO ASI Series B , vol.367
    • Aliev, Y.M.1    Kaganovich, I.D.2    Schluter, H.3
  • 38
    • 0142077098 scopus 로고
    • The anomalous skin-effect in thin cylindrical conductors
    • B. E. Meierovich, "The anomalous skin-effect in thin cylindrical conductors," Sov. Phys. JETP, vol. 30, p. 782, 1970.
    • (1970) Sov. Phys. JETP , vol.30 , pp. 782
    • Meierovich, B.E.1
  • 39
    • 0026840985 scopus 로고
    • Low-pressure RF discharge in the free-flight regime
    • Apr
    • I. D. Kaganovich and L. D. Tsendin, "Low-pressure RF discharge in the free-flight regime," IEEE Trans. Plasma Sci, vol. 20, no. 2, pp. 86-92, Apr. 1992.
    • (1992) IEEE Trans. Plasma Sci , vol.20 , Issue.2 , pp. 86-92
    • Kaganovich, I.D.1    Tsendin, L.D.2
  • 40
    • 0041321028 scopus 로고    scopus 로고
    • Effect of electron energy distribution function on power deposition and plasma density in an inductively coupled discharge at very low pressures
    • B. Ramamurthi, D. J. Economou, and I. D. Kaganovich, "Effect of electron energy distribution function on power deposition and plasma density in an inductively coupled discharge at very low pressures," Plasma Sources Sci. Technol., vol. 12, p. 302, 2002.
    • (2002) Plasma Sources Sci. Technol , vol.12 , pp. 302
    • Ramamurthi, B.1    Economou, D.J.2    Kaganovich, I.D.3


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