Theoretical investigation of the evolution of electron energy distribution functions in inductively coupled discharges

Thin Solid Films

Volumn 435, Issue 1-2, 2003, Pages 72-77

  Kim, S S ^a   Chung, Chin Wook ^b   Chang, H Y ^c  

^a Korea Basic Science Institute (KBSI)   (South Korea)

^b Hanyang University   (South Korea)

^c Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Collisionality; Electron energy distribution function (EEDF); Heating; Inductively coupled plasma (ICP)

Indexed keywords

APPROXIMATION THEORY; ELECTRON ENERGY LEVELS; MAGNETIC FIELDS;

COUPLED DISCHARGES;

PLASMA APPLICATIONS;

EID: 0038009103     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00375-4     Document Type: Conference Paper

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