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Volumn 7, Issue 12, 2007, Pages 1660-1662

Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds

(4) Giang, Ut Binh T a Lee, Dooyoung a King, Michael R a Delouise, Lisa A a,b

a University of Rochester (United States)

b UNIVERSITY OF ROCHESTER SCHOOL OF MEDICINE AND DENTISTRY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIMETICONE; SILICON;

ARTICLE; CHEMICAL PROCEDURES; DEEP REACTIVE ION ETCHED; LATITUDE; METHODOLOGY; MICROFABRICATION; PRIORITY JOURNAL; RADIUS;

EID: 36349007501 PISSN: 14730197 EISSN: 14730189 Source Type: Journal
DOI: 10.1039/b714742b Document Type: Article

Times cited : (54)

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