A novel fabrication method of microlens array by surface tension and injection process

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Volumn , Issue , 2007, Pages 443-446

  Lin, Yu Hsin ^a,b,c   Hsu, Wensyang ^b  

^a IEEE

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^c NATIONAL APPLIED RESEARCH LABORATORIES   (Taiwan)

Author keywords

Injection; Optical device; Polymer microlens; Surface tension

Indexed keywords

OPTICAL DEVICES; OPTICAL FIBER FABRICATION; SURFACE TENSION;

CANTILEVERS; POLYMER MICROLENS ARRAYS; SILICON MEMBRANES;

MICROLENSES;

EID: 34548132794     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352055     Document Type: Conference Paper

References (11)

1. Hsiharng Yang, Ching Kong Chao, Che Ping Lin and Sheng Chih Shen, "Micro ball lens array molding and fabrication using thermal reflow in two polymer layers", J. Micromech. Microeng. 14(2004), pp.277-282.
2. th Annual Meeting of the IEEE/LEOS 2002, pp.655-656.
3. Su ding Moon, Namsuk Lee and Shinill Kang, "Fabrication of a microlens array using micro compression molding with an electroformed mold insert", J. Micromech. Microeng. 13(2003), pp.98-103.
4. Youngjoo Yee, Jong Uk Bu, Il Joo Cho, Euisik Yoon, Su Dong Moon and Shinill Kang, "Micro solid immersion lens fabricated by micro molding for near field optical data storage", Optical MEMS, 2000 IEEE/LEOS, pp.91-92.
5. Teng Kai Shin, Jeng Rong Ho and J. W. John Cheng, "A new approach to polymeric microlens array fabrication using soft replica molding", IEEE Photonics Technology Letters, Vol. 16, No.9.
6. D. L. MacFarlane, V. Narayan, J. A. Tatum, W. R. Cox, T. Chen and D. J. Hayes, "Microjet fabrication of microlens arrays", IEEE Photonics Technology Letters, Vol.6, No.9, September 1994, pp.1112-1114.
7. Yuzo Ishii, Shinji Koike, Yoshimitsu Arai and Yasuhiro Ando, "Ink-Jet fabrication of polymer microlens for optical I/O chip packaging", Jpn. J. Appl. Phys. Vol.39, 2000, pp. 1490-1493.
8. th IEEE International Conference on MicroElectroMechanical Systems, 2002, pp.520-523.
9. th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, June 5-9, 2005.
10. P. F. Man, C. H. Mastrangelo, M. A. Burns and D. T. Burke, "Microfabricated capillarity-driven stop valve and sample injector", 1998 MEMS Conference, Heideberg, Germany, Jan. 25-29, 1998.
11. Jun Zeng, Manish Deshpande, Ken B. Greiner and John R. Gilbert, "Fluidic capacitance model of capillary-driven stop valves", 2000, ASME.