Model-based analysis of the limits of optical metrology with experimental comparisons

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6617, Issue , 2007, Pages

  Silver, R M ^a   Attota, R ^a   Marx, E ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE OF ILLUMINATION; ANGLE RESOLVED IMAGES; CRITICAL DIMENSION METROLOGY; SCATTERFIELD MICROSCOPY TECHNIQUES;

ELECTROMAGNETIC WAVE SCATTERING; MATHEMATICAL MODELS; OPTICAL MICROSCOPY; OPTICAL VARIABLES MEASUREMENT;

OPTICAL SYSTEMS;

EID: 36249004427     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.726201     Document Type: Conference Paper

References (10)

1. R. M. Silver, R. Attota, M. Stocker, M. Bishop*, L. Howard, T. Germer, E. Marx, M. Davidson and R. Larrabee, "High-resolution Optical Metrology", Proc. SPIE Vol. 5752 p. 67, (2005).
2. R. Attota, R. M. Silver, M. Bishop, E. Marx, J. Jun, M. Stocker. Davidson, and R. Larrabee, "Evaluation of new in-chip and arrayed line overlay target designs", Proc. SPIE Vol. 5375, P. 395, 2004.
3. R. M. Silver, R. Attota, M. Stocker, M. Bishop, J. Jun, E. Marx, M. Davidson, and R. Larrabee, "High-resolution Optical Overlay Metrology", SPIE Vol. 5375 P. 78, 2004.
4. E. Marx and J. Potzick, "Simulation of Optical Microscope Images of Photomask Feature Size Measurements", Proc. IEEE IEEE Antennas and Propagation, 2006.
5. M. Davidson, B.H. Kleemann, and J. Bischoff, "A comparison between rigorous light scattering methods," in Optical Microlithography X, SPIE, Vol. 305, 1997, p.606.
6. R. Silver, T. Germer, R.Attota, E. Marx, M. Davidson, B. Barnes, J. Jun, and R. Larrabee, "Fundamental Optical Critical Dimension (OCD) Limits: A Simulation Study", Tech Transfer #06044749A-TR, May, 2006.
7. R M. Silver, B. Barnes, R. Attota, E. Marx, and H. Patrick, "Scatterfield Microscopy for Extending the Limits of Image-based Optical Metrology", Accepted to Applied optics, April 2007.
8. R M. Silver, B. Barnes, R. Attota, J. Jun, J. Filliben, J. Soto, M. Stocker, P. Lipscomb, E. Marx, H. Patrick., R. Dixson, and R. Larrabee, "The Limits of Image-based Optical Metrology", SPIE Vol. 6152 P. 6152OZ, 2006.
9. B. Barnes, L. Howard, J. Jun, P. Lipscomb, and R. Silver, "Zero-order imaging of device-sized overlay targets using scatterfield microscopy," Proc. SPIE 6518, 65180F (2007).
10. R . Attota, R. M. Silver, T. Germer, M. Bishop*, R. Larrabee, M. Stocker, and L. Howard, "Application of Through-focus Focus-metric Analysis in High Resolution Optical Microscopy", Proc. SPIE Vol. 5752 (2005).