Investigation of the microstructure and optical properties of hydrogenated polymorphous silicon films prepared with pure silane

Philosophical Magazine

Volumn 87, Issue 35, 2007, Pages 5539-5549

  Li, S B ^a   Wu, Z M ^a   Li, W ^a   Liao, N M ^a   Jiang, Y D ^a  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROSTRUCTURE; OPTICAL PROPERTIES; X RAY DIFFRACTION ANALYSIS;

GAS PRESSURE; INTER-ELECTRODE DISTANCE; X-RAY DIFFRACTION AT GRAZING INCIDENCE ANGLE (XRDGI);

METALLIC FILMS;

EID: 36248975231     PISSN: 14786435     EISSN: 14786443     Source Type: Journal    
DOI: 10.1080/14786430701666190     Document Type: Article

References (23)

1. R. Saleh and N.H. Nickel, Thin Solid Films 427 266 (2003).
2. J.M. Siéfert and G. de Rosny, Phil. Mag. B 54 L57 (1986).
3. P. Roca i Cabarrocas, Y. Bouizem and M.L. Thèye, Phil. Mag. B 65 1025 (1992).
4. R.A. Street, Phil. Mag. B 60 213 (1989).
5. S. Kalbitzer, G. Müller, P.G. Le Comber, et al., Phil. Mag. B 41 439 (1980).
6. M. Gorn, P. Lechner, H.D. Mohring, et al., Phil. Mag. B 64 101 (1991).
7. T. Mates, A. Fejfar, I. Drbohlav, et al., J. Non-Crystalline Solids 767 299 (2002).
8. G. Ambrosone, U. Coscia, R. Murri, et al., Solar Energy Mater. Solar Cells 87 375 (2005).
9. G. van Elzakker, V. Nádaždy, F.D. Tichelaar, et al., Thin Solid Films 511-512 252 (2006).
10. D. Grozdanic, B. Rakvin, B. Pivac, et al., Thin Solid Films 515 5620 (2007).
11. A. Fontcuberta i Morral and P. Roca i Cabarrocas, Thin Solid Films 383 161 (2001).
12. H. Chen and W.Z. Shen, Surf. Coatings Technol. 198 98 (2005).
13. M. Meaudre, R. Meaudre, R. Butté, et al., J. Appl. Phys. 86 946 (1999).
14. C. Longeaud, J.P. Kleider, P. Roca i Cabarrocas, et al., J. Non-Crystalline Solids 227-230 96 (1999).
15. E. Vassalo, A. Cremona, F. Ghezzi, et al., Appl. Surf. Sci. 252 7993 (2006).
16. K. Adhikary and S. Ray, J. Non-Crystalline Solids 353 2289 (2007).
17. G. Ganguly and A. Matsuda, Phys. Rev. B 47 3661 (1993).
18. Y.M. Li, I. An, H.V. Nguyen, et al., Phys. Rev. Lett. 68 2814 (1992).
19. A.R. Forouhi and I. Bloomer, Phys. Rev. B 34 7018 (1986).
20. R.O. Jones, B.W. Clare and P.J. Jennings, Phys. Rev. B 64 125203-1 (2001).
21. M. Kopáni, E. Pinčík, H. Kobayshi, et al., Appl. Surf. Sci. 252 7722 (2006).
22. J. Kočka, T. Mates, H. Stuchlíková, et al., Thin Solid Films 501 107 (2006).
23. J. Müllerová, S. Jurečka and P. Šutta, Solar Energy 80 667 (2006).