Deep level thermal evolution in Fe implanted InP

Journal of Applied Physics

Volumn 102, Issue 9, 2007, Pages

  Cesca, Tiziana ^a   Gasparotto, Andrea ^a   Piana, Erio ^b   Fraboni, Beatrice ^b  

^a UNIVERSITY OF PADOVA   (Italy)

^b UNIVERSITY OF BOLOGNA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CURRENT DENSITY; ELECTRON TRAPS; HEAT CONDUCTION; THERMAL EFFECTS;

DOMINANT TRAPS; ELECTRICAL COMPENSATION; HIGH TEMPERATURE ANNEALING; THERMAL EVOLUTION;

ION IMPLANTATION;

EID: 36248961008     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2812551     Document Type: Article

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