Fabrication of stamps for microcontact printing by injection molding

Microelectronic Engineering

Volumn 85, Issue 1, 2008, Pages 187-194

  Chandekar, Amol ^a   Alabran, Michael ^a   Sengupta, Sandip K ^a   Lee, Jun S ^a   Mead, Joey L ^a   Barry, Carol M F ^a   Whitten, James E ^a   Somu, Sivasubramanian ^b   Busnaina, Ahmed A ^b  

^a University of Massachusetts   (United States)

^b NORTHEASTERN UNIVERSITY   (United States)

Author keywords

Microcontact printing; Microinjection molding; Silicon mold; Soft lithography

Indexed keywords

FIELD EFFECT TRANSISTORS; GATE DIELECTRICS; MICROELECTRONICS; MOLDING; NANOTECHNOLOGY;

FLUORINATED ALKANETHIOLS; MICROCONTACT PRINTING; MICROINJECTION MOLDING; SILICON MOLDS; SOFT LITHOGRAPHY;

STAMPING;

EID: 36148995434     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.05.008     Document Type: Article

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