Quantitative analysis of thin-film conductivity by scanning microwave microscope

Applied Surface Science

Volumn 254, Issue 3, 2007, Pages 757-759

  Okazaki, Sohei ^a   Okazaki, Noriaki ^b   Hirose, Yasushi ^c   Furubayashi, Yutaka ^c   Hitosugi, Taro ^a,c   Shimada, Toshihiro ^a,c   Hasegawa, Tetsuya ^a,c  

^a UNIVERSITY OF TOKYO   (Japan)

^b UNIVERSITY OF TOKUSHIMA   (Japan)

^c KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Combinatorial materials science; Conductivity; Finite element method; Quantitative analysis; Scanning microwave microscope; Thin film

Indexed keywords

CHEMICAL ANALYSIS; ELECTRIC CONDUCTIVITY; ELECTRIC FIELDS; FILM THICKNESS; FINITE ELEMENT METHOD; TITANIUM COMPOUNDS;

ELECTRICAL FIELD SIMULATION; SCANNING MICROWAVE MICROSCOPE; THIN-FILM CONDUCTIVITY;

THIN FILMS;

EID: 36049044493     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.06.076     Document Type: Article

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