A systematic study on MOS type radiation sensors

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 264, Issue 2, 2007, Pages 287-292

  Yilmaz, Ercan ^a   Kaleli, Buket ^b   Turan, Raşit ^b  

^a MUSTAFA KEMAL UNIVERSITY   (Turkey)

^b MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Dosimeters; MOS capacitor; MOS devices; Radiation effects; Radiation sensor

Indexed keywords

ANNEALING; DOSIMETERS; GAMMA RAYS; MICROELECTRONICS; RADIATION EFFECTS; SENSITIVITY ANALYSIS; THICKNESS MEASUREMENT;

GRAY DOSE; OXIDE THICKNESS; POST ANNEALING; RADIATION SENSORS; SENSING PROCESS;

MOS CAPACITORS;

EID: 36048987799     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.08.081     Document Type: Article

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