Undulation of sub- 100 nm porous dielectric structures: A mechanical analysis

Applied Physics Letters

Volumn 91, Issue 19, 2007, Pages

  Darnon, M ^a   Chevolleau, T ^a   Joubert, O ^a   Maitrejean, S ^a   Barbe, J C ^a   Torres, J ^b  

^a CEA LETI   (France)

^b STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; ELASTIC CONSTANTS; INTEGRATED CIRCUITS; RESIDUAL STRESSES; STRAIN ENERGY; TITANIUM NITRIDE;

POROUS DIELECTRICS;

DIELECTRIC MATERIALS;

EID: 36048981936     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2805774     Document Type: Article

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