Deformation analysis in microstructures and micro-devices

Microelectronics Reliability

Volumn 47, Issue 12, 2007, Pages 2226-2230

  Liu, Zhanwei ^a,b   Xie, Huimin ^b   Fang, Daining ^b   Gu, Changzhi ^c   Meng, Yonggang ^b   Wang, Weining ^d   Fang, Yan ^d   Miao, Jianmin ^e  

^a BEIJING INSTITUTE OF TECHNOLOGY   (China)

^b TSINGHUA UNIVERSITY   (China)

^c INSTITUTE OF PHYSICS   (China)

^d Beijing Key Lab for Nano photonics and Nano structure   (China)

^e NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; ELECTRON MICROSCOPES; FOCUSED ION BEAMS; IMAGE ANALYSIS; MEMS; SOFTWARE ENGINEERING;

IMAGES CAPTURED; MICRO-DEVICES; MICRO/NANOMETER SENSITIVITY;

MICROSTRUCTURE;

EID: 35649007818     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2006.11.019     Document Type: Article

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