Hole drilling of glass substrates with a CO2 laser

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 5 A, 2003, Pages 2881-2886

  Ogur, Hiroshi ^a   Yoshida, Yoshikazu ^b  

^a PANASONIC CORPORATION   (Japan)

^b TOYO UNIVERSITY   (Japan)

Author keywords

CO2 laser; Hole drilling; Pyrex glass; Soda lime glass; Synthetic quartz

Indexed keywords

DRILLING; GLASS; LASER PULSES; SUBSTRATES;

PYREX GLASS;

CARBON DIOXIDE LASERS;

EID: 0038380731     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.2881     Document Type: Article

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