Analytical model of micromachining of brittle materials with sharp particles

Microelectronics Journal

Volumn 36, Issue 3-6, 2005, Pages 608-611

  Moktadir, Z ^a   Wensink, H ^b   Kraft, M ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Analytical model; Brittle materials; Micromachining

Indexed keywords

BRITTLENESS; CONTINUUM MECHANICS; MATHEMATICAL MODELS; POWDERS; RELAXATION PROCESSES;

ANALYTICAL MODEL; POWDER BLASTING; SURFACE ENERGETICS; SURFACE EVOLUTION;

MICROMACHINING;

EID: 33644605484     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2005.02.082     Document Type: Conference Paper

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