Subsurface damage and microstructure development in precision microground hard ceramics using magnetorheological finishing spots

Applied Optics

Volumn 46, Issue 22, 2007, Pages 5500-5515

  Shafrir, Shai N ^b   Lambropoulos, John C ^a   Jacobs, Stephen D ^a  

^a University of Rochester   (United States)

^b UNIVERSITY OF ROCHESTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; FINISHING; MAGNETOOPTICAL EFFECTS; POLYCRYSTALLINE MATERIALS; POWER SPECTRAL DENSITY; RHEOLOGY; SURFACE ROUGHNESS;

MAGNETORHEOLOGICAL FINISHING (MRF); MICROGRINDING; SURFACE MICROROUGHNESS;

CERAMIC MATERIALS;

EID: 35448938373     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.005500     Document Type: Article

References (43)

1. L. Yin, E. Y. J. Vancoille, L. C. Lee, B. Huang, K. Ramesh, and X. D. Liu, "High-quality grinding of polycrystalline silicon carbide spherical surface," Wear 256, 197-207 (2004).
2. S. Malkin and T. W. Hwang, "Grinding mechanisms for ceramics," Anal. CIRP 45, 569-580 (1996).
3. B. Lin, S. Y. Yu, B. Lin, and A. B. Yu, "Study of the formation and propagation conditions of grinding crack for ceramics," Key Eng. Mater. 202-203, 121-126 (2001).
4. A. G. Evans and D. B. Marshall, "Wear mechanisms in ceramics," in Fundamentals of Friction and Wear of Materials, D. A. Rigney, ed. (American Society for Metals, 1981), pp. 439-452.
5. J. A. Menapace, P. J. Davis, W. A. Steele, L. L. Wong, T. I. Suratwala, and P. E. Miller, "Utilization of magnetorheological finishing as a diagnostic tool of investigation the threedimensional structure of fractures in fused silica," Proc. SPIE 5991, 599102 (2005).
6. J. C. Lambropoulos, S. D. Jacobs, and J. Ruckman, "Material removal mechanisms from grinding to polishing," in Finishing of Advanced Ceramics and Glasses Symposium at the 101st Annual Meeting of the American Ceramic Society, R. Sabia, V. A. Greenhunt, and C. G. Pantano, eds. (American Ceramic Society, 1999), pp. 113-128.
7. K. R. Fine, R. Garbe, T. Gip, and Q. Nguyen, "Non-destructive, real time direct measurement of subsurface damage," Proc. SPIE 5999, 105-110 (2005).
8. 2 deepultraviolet and vacuum-ultraviolet optical components by the quasi-Brewster angel technique," Appl. Opt. 45, 5621-5628 (2006).
9. P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, "The distribution of subsurface damage in fused silica," Proc. SPIE 5991, 599101 (2005).
10. W. Kanematsu, "Visualization of subsurface damage in silicon nitride from grinding by a plasma etching and dye impregnation method," J. Am. Ceram. Soc. 89, 2564-2570 (2006).
11. B. Zhang and T. D. Howes, "Material-removal mechanisms in grinding ceramics," Anal. CIRP 43, 305-308 (1994).
12. B. Zhang and T. D. Howes, "Subsurface evaluation of ground ceramics," Anal. CIRP 44, 263-266 (1995).
13. J. A. Randi, J. C. Lambropoulos, and S. D. Jacobs, "Subsurface damage in some single crystalline optical materials," Appl. Opt. 44, 2241-2249 (2005).
14. H. H. K. Xu, S. Jahanmir, and Y. Wang, "Effect of grain size on scratch linteractions and material removal in alumina," J. Am. Ceram. Soc. 78, 881-891 (1995).
15. J. A. Menapace, P. J. Davis, W. A. Steele, L. L. Wong, T. I. Suratwala, and P. E. Miller, "MRF applications: measurement of process-dependent subsurface damage in optical materials usin the MRF wedge technique," Proc. SPIE 5991, 39-49 (2005).
16. F. W. Preston, "The stracture of abraded glass surfaces," Trans. Opt. Soc. 23, 141-164 (1922).
17. F. K. Aleinikov, "The influence of abrasive powder microhardness on the values of the coefficients of volume removal," Sov. Phys. Tech. Phys. 2, 505-511 (1957).
18. P. P. Hed and D. F. Edwards, "Optical glass fabrication technology. 2: relationship between surface roughness and subsurface damage," Appl. Opt. 26, 4677-4680 (1987).
19. J. C. Lambropoulos, Y. Li, P. D. Funkenbusch, and J. L. Ruckman, "Noncontact estimate of grinding-induced subsurface damage," Proc. SPIE 3782, 41-50 (1999).
20. S. N. Shafrir, J. C. Lambropoulos, and S. D. Jacobs, "A magnetorheological polishing-based approach for studying precision microground surfaces of tungsten carbides," Precis. Eng. 31, 83-93 (2007).
21. S. N. Shafrir, J. C. Lambropoulos, and S. D. Jacobs, "Toward magnetorheological finishing of magnetic materials (technical brief)," J. Manuf. Sci. Eng. (to be published).
22. J. C. Lambropoulos, "From abrasive size to subsurface damage in grinding," in Optical Fabrication and Testing, Postconference Digest, Vol. 42 of OSA trends in Optics and Photonics (Optical Society of America), pp. 17-18.
23. A. G. Evans, "Fracture toughness: the role of indentation techniques," in Fracture Mechanics Applied to Brittle Materials, S. W. Fierman, ed. (American Society for Testing and Materials, 1979), pp. 112-135.
24. D. Halliday, R. Resnick, and J. Walker, Fundamentals of Physics (Wiley, 1997).
25. OptiPro Systems, SX 50 CNC deterministic microgrinding machine.
26. OptiPro Systems, SX 150 CNC deterministic microgrinding machine.
27. Lighthouse Lubricant Solutions, Opticut GPM 5% in water, pH 9-10.
28. S. D. Jacobs, H. M. Pollicove, W. I. Kordonski, and D. Golini, "Magnetorheological finishing (MRF) in deterministic optics manufacturing," in International Conference on Precision Engineering (ICPE), (Taipei, Taiwan, 1997), pp. 685-690.
29. A. B. Shorey, S. D. Jacobs, W. E. Kordonski, and R. F. Gans, "Experiments and observations regarding the mechanisms of glass removal in magnetorheological finishing," Appl. Opt. 40, 20-33 (2001).
30. QED Technologies, Q22-Y CNC machine.
31. QED Technologies, D10 MR fluid.
32. Taylor Hobson, TalySurf 2 PGI profilometer.
33. Zygo Corp., NewView 5000 noncontact profilometer.
34. Nano Technology Systems Division Carl Zeiss NTS GmbH, LEO 982 FE SEM.
35. Veeco Instruments, Dimension 3100S-1 AFM.
36. Leica Microsystems, Light Microscope.
37. S. N. Shafrir, "Surface finish and subsurface damage in polycrystalline optical materials," Ph.D. dissertation (University of Rochester, 2007).
38. S. R. Arrasmith, I. A. Kozhinova, L. L. Gregg, A. B. Shorey, H. J. Romanofsky, S. D. Jacobs, D. Golini, W. E. Kordonski, S. Hogan, and P. Dumas, "Details of the polishing spot in Magnetorheological finishing (MRF)," Proc. SPIE 3782, 92-100 (1999).
39. J. E. DeGroote, A. E. Marino, K. E. Spencer, and S. D. Jacobs, "Power spectral density plots inside MRF spots made with a polishing abrasive-free MR fluid," Proc. SPIE TD03, 134-138 (2005).
40. E. Marx, I. J. Malik, Y. E. Strausser, T. Bristow, N. Poduje, and J. C. Stover, "Power spectral densities: a multiple technique study of different Si wafer surfaces," J. Vac. Sci. Technol. B 20, 31-41 (2002).
41. A. Duparré, J. Ferre-Borrull, S. Gliech, G. Notni, J. Steinert, and J. M. Bennett, "Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components," Appl. Opt. 41, 154-171 (2002).
42. C. J. Walsh, A. J. Leistner, and B. F. Oreb, "Power spctral density analysis of optical substrates for gravitational-wave interferometry," Appl. Opt. 38, 4790-4801 (1999).
43. L. L. Gregg, A. E. Marino, and S. D. Jacobs, "Grain decoration in aluminum oxynitride (ALON) from polishing on bound abrasive laps," Proc. SPIE TD02, 81-83 (2003).