-
1
-
-
5544302793
-
Influence of process parameters in deterministic microgrinding
-
of 1994 OSA Technical Digest Series, (Optical Society of America, Washington, D.C.,) See also Ref. 2
-
D. Golini, A. Lindquist, M. Atwood, and C. Ferreira, "Influence of process parameters in deterministic microgrinding," in Optical Fabrication and Testing Workshop, Vol. 13 of 1994 OSA Technical Digest Series, (Optical Society of America, Washington, D.C., 1994), pp. 28-31. See also Ref. 2.
-
(1994)
Optical Fabrication and Testing Workshop
, vol.13
, pp. 28-31
-
-
Golini, D.1
Lindquist, A.2
Atwood, M.3
Ferreira, C.4
-
2
-
-
5544289693
-
Computer aided optics manufacturing
-
June
-
H. H. Pollicove, D. Golini, and J. Ruckman, "Computer aided optics manufacturing," Opt. Photon. News, June 1994, pp. 15-19.
-
(1994)
Opt. Photon. News
, pp. 15-19
-
-
Pollicove, H.H.1
Golini, D.2
Ruckman, J.3
-
3
-
-
0004229658
-
-
American Institute of Physics, New York, Chap. 4
-
T. S. Izumitani, Optical Glass (American Institute of Physics, New York, 1986), Chap. 4.
-
(1986)
Optical Glass
-
-
Izumitani, T.S.1
-
5
-
-
0026154663
-
Ductile-regime grinding: A new technology for machining brittle materials
-
T. G. Bifano, T. A. Dow, and R. O. Scattergood, "Ductile-regime grinding: a new technology for machining brittle materials," ASME J. Eng. Ind. 113, 184-189.
-
ASME J. Eng. Ind.
, vol.113
, pp. 184-189
-
-
Bifano, T.G.1
Dow, T.A.2
Scattergood, R.O.3
-
6
-
-
0025545164
-
Transition between brittle and ductile mode in loose abrasive grinding
-
Advanced Optical Manufacturing and Testing, L. R. Baker, P. B. Reid, and G. M. Sanger, eds.
-
D. Golini and S. D. Jacobs, "Transition between brittle and ductile mode in loose abrasive grinding," in Advanced Optical Manufacturing and Testing, L. R. Baker, P. B. Reid, and G. M. Sanger, eds., Proc. SPIE 1333, 80-91 (1990).
-
(1990)
Proc. SPIE
, vol.1333
, pp. 80-91
-
-
Golini, D.1
Jacobs, S.D.2
-
7
-
-
0030271056
-
Twyman effect mechanics in grinding and microgrinding
-
J. C. Lambropoulos, S. Xu, T. Fang, and D. Golini, "Twyman effect mechanics in grinding and microgrinding," Appl. Optics 35, 5704-5713 (1996).
-
(1996)
Appl. Optics
, vol.35
, pp. 5704-5713
-
-
Lambropoulos, J.C.1
Xu, S.2
Fang, T.3
Golini, D.4
-
8
-
-
0000553337
-
Amorphization and conductivity of silicon and germanium induced by indentation
-
D. R. Clarke, M. C. Kroll, P. D. Kirchner, R. F. Cook, and B. J. Hockey, "Amorphization and conductivity of silicon and germanium induced by indentation," Phys. Rev. Lett. 60, 2156-2159 (1988).
-
(1988)
Phys. Rev. Lett.
, vol.60
, pp. 2156-2159
-
-
Clarke, D.R.1
Kroll, M.C.2
Kirchner, P.D.3
Cook, R.F.4
Hockey, B.J.5
-
9
-
-
0000144195
-
Phase transformations of silicon caused by contact loading
-
A. Kailer, Y. G. Gogotsi, and K. G. Nickel, "Phase transformations of silicon caused by contact loading," J. Appl. Phys. 81, 3057-3063 (1997).
-
(1997)
J. Appl. Phys.
, vol.81
, pp. 3057-3063
-
-
Kailer, A.1
Gogotsi, Y.G.2
Nickel, K.G.3
-
10
-
-
18744407253
-
Contact resistance and phase transformations during nanoindentation of silicon
-
A. B. Mann, D. van Heerden, J. B. Pethica, P. Bowes, and T. P. Weihs, "Contact resistance and phase transformations during nanoindentation of silicon," Philos. Mag. A82, 1921-1929 (2002).
-
(2002)
Philos. Mag.
, vol.A82
, pp. 1921-1929
-
-
Mann, A.B.1
Van Heerden, D.2
Pethica, J.B.3
Bowes, P.4
Weihs, T.P.5
-
11
-
-
0037055283
-
Transmission electron microscopy of amorphization and phase transformation beneath indents in Si
-
H. Saka, A. Shimatani, M. Suganuma, and Suprijadi, "Transmission electron microscopy of amorphization and phase transformation beneath indents in Si," Philos. Mag. A82, 1971-1982 (2002).
-
(2002)
Philos. Mag.
, vol.A82
, pp. 1971-1982
-
-
Saka, H.1
Shimatani, A.2
Suganuma, M.3
Suprijadi4
-
12
-
-
6344256622
-
Examining pressure-induced phase transformations in silicon by spherical inden tation and Raman spectroscopy: A statistical study
-
T. Juliano, V. Domnich, and Y. Gogotsi, "Examining pressure-induced phase transformations in silicon by spherical inden tation and Raman spectroscopy: a statistical study," J. Mater. Res. 19, 3099-3108 (2004).
-
(2004)
J. Mater. Res.
, vol.19
, pp. 3099-3108
-
-
Juliano, T.1
Domnich, V.2
Gogotsi, Y.3
-
13
-
-
0343541122
-
Structure of abraded glass surfaces
-
F. W. Preston, "Structure of abraded glass surfaces," Trans. Opt. Soc. 23(3), 141-164 (1922).
-
(1922)
Trans. Opt. Soc.
, vol.23
, Issue.3
, pp. 141-164
-
-
Preston, F.W.1
-
14
-
-
0024750612
-
State-of-the-art non-destructive measurement of subsurface material properties and damages
-
E. Brinksmeier, "State-of-the-art non-destructive measurement of subsurface material properties and damages," Precis. Eng. 11, 211-224 (1989).
-
(1989)
Precis. Eng.
, vol.11
, pp. 211-224
-
-
Brinksmeier, E.1
-
15
-
-
0002561470
-
Observations by TEM on the subsurface damage produced in aluminum oxide by mechanical polishing and grinding
-
B. J. Hockey, "Observations by TEM on the subsurface damage produced in aluminum oxide by mechanical polishing and grinding," Proc. Br. Ceram. Soc. 20, 95-115 (1972).
-
(1972)
Proc. Br. Ceram. Soc.
, vol.20
, pp. 95-115
-
-
Hockey, B.J.1
-
16
-
-
0014735098
-
X-ray measurement of elastic strain and annealing in semiconductors
-
B. G. Cohen and M. W. Frocht, "X-ray measurement of elastic strain and annealing in semiconductors," Solid-State Electron. 13, 105-112 (1970).
-
(1970)
Solid-State Electron.
, vol.13
, pp. 105-112
-
-
Cohen, B.G.1
Frocht, M.W.2
-
17
-
-
0010672754
-
Comprehensive investigation of polish-induced surface strain in (100) and (111) GaAs and InP
-
Z. Hang, H. Shen, and F. H. Pollak, "Comprehensive investigation of polish-induced surface strain in (100) and (111) GaAs and InP," J. Appl. Phys. 64, 3233-3242 (1988).
-
(1988)
J. Appl. Phys.
, vol.64
, pp. 3233-3242
-
-
Hang, Z.1
Shen, H.2
Pollak, F.H.3
-
18
-
-
0021816884
-
A study of lapping and polishing damage in single-crystal CdTe
-
D. F. Weirauch, "A study of lapping and polishing damage in single-crystal CdTe," J. Electrochem. Soc. 132, 250-254 (1985).
-
(1985)
J. Electrochem. Soc.
, vol.132
, pp. 250-254
-
-
Weirauch, D.F.1
-
19
-
-
0005070999
-
Ultrasonic measurement of surface and subsurface structure in ceramics
-
NIST Special Publ. 847, S. Jahanmir, ed. (U. S. Gov. Printing Office, Washington, D.C.)
-
J. A. Slotwincki, N. N. Hsu, and G. V. Blessing, "Ultrasonic measurement of surface and subsurface structure in ceramics," in Proceeding of the International Conference on Machining of Advanced Materials, NIST Special Publ. 847, S. Jahanmir, ed. (U. S. Gov. Printing Office, Washington, D.C., 1993).
-
(1993)
Proceeding of the International Conference on Machining of Advanced Materials
-
-
Slotwincki, J.A.1
Hsu, N.N.2
Blessing, G.V.3
-
20
-
-
0039789778
-
Characterization of subsurface damage in GaAs processed by Ga+ focused ion-beam-assisted C12 etching using photoluminescence
-
M. Taneya, Y. Sugimoto, and K. Akita, "Characterization of subsurface damage in GaAs processed by Ga+ focused ion-beam-assisted C12 etching using photoluminescence," J. Appl. Phys. 66, 1375-1381 (1989).
-
(1989)
J. Appl. Phys.
, vol.66
, pp. 1375-1381
-
-
Taneya, M.1
Sugimoto, Y.2
Akita, K.3
-
21
-
-
84957349701
-
Damaged layers in abraded silicon surfaces
-
E. N. Pugh and L. E. Samuels, "Damaged layers in abraded silicon surfaces," J. Electrochem. Soc. 111, 1430-1432 (1964).
-
(1964)
J. Electrochem. Soc.
, vol.111
, pp. 1430-1432
-
-
Pugh, E.N.1
Samuels, L.E.2
-
22
-
-
0028442302
-
Simple technique for observing subsurface damage in machining of ceramics
-
H. H. K. Xu and S. Jahanmir, "Simple technique for observing subsurface damage in machining of ceramics," J. Am. Ceram. Soc. 77, 1388-1390 (1994).
-
(1994)
J. Am. Ceram. Soc.
, vol.77
, pp. 1388-1390
-
-
Xu, H.H.K.1
Jahanmir, S.2
-
23
-
-
0013223866
-
Optical glass fabrication technology. 2. Relationship between surface roughness and subsurface damage
-
D. F. Edwards and P. P. Hed, "Optical glass fabrication technology. 2. Relationship between surface roughness and subsurface damage," Appl. Opt. 26, 4677-4680 (1987).
-
(1987)
Appl. Opt.
, vol.26
, pp. 4677-4680
-
-
Edwards, D.F.1
Hed, P.P.2
-
24
-
-
0028743008
-
Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses
-
Y. Zhou, P. D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, "Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses," J. Amer. Ceram. Soc. 77, 3277-3280 (1994).
-
(1994)
J. Amer. Ceram. Soc.
, vol.77
, pp. 3277-3280
-
-
Zhou, Y.1
Funkenbusch, P.D.2
Quesnel, D.J.3
Golini, D.4
Lindquist, A.5
-
25
-
-
0035760747
-
The use of magnetorheological finishing (MRF) to relieve residual stress and subsurface damage on lapped semiconductor silicon wafers
-
Optical Manufacturing and Testing IV, H. P. Stahl, ed.
-
S. R. Arrasmith, S. D. Jacobs, J. C. Lambropoulos, A. Maltsev, D. Golini, W. I. Kordonski, and E. E. Cleaveland, "The use of magnetorheological finishing (MRF) to relieve residual stress and subsurface damage on lapped semiconductor silicon wafers," in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE 4451, 286-294 (2001).
-
(2001)
Proc. SPIE
, vol.4451
, pp. 286-294
-
-
Arrasmith, S.R.1
Jacobs, S.D.2
Lambropoulos, J.C.3
Maltsev, A.4
Golini, D.5
Kordonski, W.I.6
Cleaveland, E.E.7
-
26
-
-
1842479214
-
Deformation of silicon surfaces
-
Optical Materials and Structures Technologies, W. A. Goodman, ed.
-
J. C. Lambropoulos, K.-H. Chen, and T. J. Lambropoulos, "Deformation of silicon surfaces," in Optical Materials and Structures Technologies, W. A. Goodman, ed., Proc. SPIE 5179, 203-214 (2003).
-
(2003)
Proc. SPIE
, vol.5179
, pp. 203-214
-
-
Lambropoulos, J.C.1
Chen, K.-H.2
Lambropoulos, T.J.3
-
27
-
-
0010759373
-
Accumulation of defects in silicon wafers from operation to operation during mechanical finishing process
-
V. A. Perevoshchikov and V. D. Skupov, "Accumulation of defects in silicon wafers from operation to operation during mechanical finishing process," Sov. J. Opt. Technol. 56, 302-305 (1989).
-
(1989)
Sov. J. Opt. Technol.
, vol.56
, pp. 302-305
-
-
Perevoshchikov, V.A.1
Skupov, V.D.2
-
28
-
-
0002448091
-
Silicon wafer deformation after back-side grinding
-
August
-
I. Blech and D. Dang, "Silicon wafer deformation after back-side grinding," Solid State Technol., August, 1994, pp. 74-76.
-
(1994)
Solid State Technol.
, pp. 74-76
-
-
Blech, I.1
Dang, D.2
-
29
-
-
0000242089
-
Strain energy of (111) and (-1-1-1) surfaces of InSb
-
D. Haneman, "Strain energy of (111) and (-1-1-1) surfaces of InSb," Brit. J. Appl. Phys. 16, 411-413 (1965).
-
(1965)
Brit. J. Appl. Phys.
, vol.16
, pp. 411-413
-
-
Haneman, D.1
-
30
-
-
0022892115
-
Residual stress and deformation energy under ground surfaces of brittle solids
-
O. Podzimek and C. J. Heuvelman, "Residual stress and deformation energy under ground surfaces of brittle solids," Ann. CIRP 35, 397-400 (1986).
-
(1986)
Ann. CIRP
, vol.35
, pp. 397-400
-
-
Podzimek, O.1
Heuvelman, C.J.2
-
31
-
-
84957474341
-
Deformation energy under optical surfaces
-
High Power Lasers: Sources, Laser-Material Interactions, High Excitations, and Fast Dynamics, E.-W. Kreutz and D. Schuoecker, eds.
-
O. Podzimek, "Deformation energy under optical surfaces," in High Power Lasers: Sources, Laser-Material Interactions, High Excitations, and Fast Dynamics, E.-W. Kreutz and D. Schuoecker, eds., Proc. SPIE 801, 221-225 (1987).
-
(1987)
Proc. SPIE
, vol.801
, pp. 221-225
-
-
Podzimek, O.1
-
32
-
-
0023344323
-
Comparison of grinding and lapping of ferrites and metals
-
S. Chandrasekhar, M. C. Shaw, and B. Bhushan, "Comparison of grinding and lapping of ferrites and metals," ASME J. Eng. Ind. 109, 76-82 (1987).
-
(1987)
ASME J. Eng. Ind.
, vol.109
, pp. 76-82
-
-
Chandrasekhar, S.1
Shaw, M.C.2
Bhushan, B.3
-
33
-
-
84893993190
-
Deterministic microgrinding, lapping, and polishing of glass-ceramics
-
to be published
-
J. C. Lambropoulos, B. E. Gillman, S. D. Jacobs, and H. J. Stevens, "Deterministic microgrinding, lapping, and polishing of glass-ceramics," J. Amer. Ceram. Soc. (to be published).
-
J. Amer. Ceram. Soc.
-
-
Lambropoulos, J.C.1
Gillman, B.E.2
Jacobs, S.D.3
Stevens, H.J.4
-
34
-
-
0030288892
-
Determination of surface residual stresses in machined ceramics using indentation fracture
-
Y. Ahn, S. Chandrasekhar, and T. N. Farris, "Determination of surface residual stresses in machined ceramics using indentation fracture," J. Manuf. Sci. Eng. 118, 483-489 (1996).
-
(1996)
J. Manuf. Sci. Eng.
, vol.118
, pp. 483-489
-
-
Ahn, Y.1
Chandrasekhar, S.2
Farris, T.N.3
-
35
-
-
0013359993
-
The effect of certain physical and mechanical properties on the grinding of brittle materials
-
F. K. Aleinikov, "The effect of certain physical and mechanical properties on the grinding of brittle materials," Sov. Phys. Tech. Phys. 27, 2529-2538 (1957).
-
(1957)
Sov. Phys. Tech. Phys.
, vol.27
, pp. 2529-2538
-
-
Aleinikov, F.K.1
-
36
-
-
0033317667
-
Non-contact estimate of grinding-induced subsurface damage
-
Optical Instrumentation and Testing III, H. P. Stahl, ed.
-
J. C. Lambropoulos, Y. Li, P. D. Funkenbusch, and J. Ruckman, "Non-contact estimate of grinding-induced subsurface damage," in Optical Instrumentation and Testing III, H. P. Stahl, ed., Proc. SPIE 3782, 41-50 (1999).
-
(1999)
Proc. SPIE
, vol.3782
, pp. 41-50
-
-
Lambropoulos, J.C.1
Li, Y.2
Funkenbusch, P.D.3
Ruckman, J.4
-
37
-
-
85134961084
-
From abrasive size to subsurface damage in grinding
-
Optical Society of America, Washington, D.C.
-
J. C. Lambropoulos, "From abrasive size to subsurface damage in grinding," in Optical Fabrication and Testing, OSA Technical Digest (Optical Society of America, Washington, D.C., 2000), pp. 17-18.
-
(2000)
Optical Fabrication and Testing, OSA Technical Digest
, pp. 17-18
-
-
Lambropoulos, J.C.1
-
38
-
-
0010719233
-
Material removal mechanisms from grinding to polishing
-
J. C. Lambropoulos, S. D. Jacobs, and J. Ruckman, "Material removal mechanisms from grinding to polishing," Ceram. Trans. 102, 113-128 (1999).
-
(1999)
Ceram. Trans.
, vol.102
, pp. 113-128
-
-
Lambropoulos, J.C.1
Jacobs, S.D.2
Ruckman, J.3
-
39
-
-
84893993834
-
-
ISP Optics, 1 Bridge St., Irvington, N.Y. 10533
-
ISP Optics, 1 Bridge St., Irvington, N.Y. 10533, www.ispoptics.com.
-
-
-
-
40
-
-
84893989571
-
-
Crystal Systems, 27 Congress St., Salem, Mass. 01970
-
Crystal Systems, 27 Congress St., Salem, Mass. 01970, www.crystalsystems.com.
-
-
-
-
41
-
-
84894002693
-
-
Crystal Technology, Inc., 1040 East Meadow Circle, Palo Alto, Calif. 94303-4230
-
Crystal Technology, Inc., 1040 East Meadow Circle, Palo Alto, Calif. 94303-4230.
-
-
-
-
42
-
-
0032749382
-
Fracture anisotrophy in silicon single crystal
-
F. Ebrahimi and L. Kalwani, "Fracture anisotrophy in silicon single crystal," Mat. Sci. Eng. A 268, 116-126 (1999).
-
(1999)
Mat. Sci. Eng. A
, vol.268
, pp. 116-126
-
-
Ebrahimi, F.1
Kalwani, L.2
-
44
-
-
84893992476
-
-
Optipro Systems, 6368 Dean Parkway, Ontario, N.Y. 14519-8939
-
Optipro Systems, 6368 Dean Parkway, Ontario, N.Y. 14519-8939, www.optipro.com.
-
-
-
-
45
-
-
84893993231
-
-
NewView 5000: Objective, 20× Mirau; FDA resolution, high; scan length, 20 μm bipolar; min mod, 2.00; min area size, 7 Zygo Corp., Laurel Brook Road, Middlefield, Conn. 06455
-
NewView 5000: Objective, 20× Mirau; FDA resolution, high; scan length, 20 μm bipolar; min mod, 2.00; min area size, 7 (Zygo Corp., Laurel Brook Road, Middlefield, Conn. 06455, www.zygo.com).
-
-
-
-
46
-
-
0033353718
-
Details of polishing spot in magnetorheological finishing (MRF)
-
Optical Manufacturing and Testing III, H. Stahl, ed.
-
S. R. Arrasmith, I. A. Kozhinova, L. L. Gregg, A. B. Shorey, H. J. Romanofsky, S. D. Jacobs, D. Golini, W. I. Kordonski, S. Hogan, P. Dumas, "Details of polishing spot in magnetorheological finishing (MRF)," in Optical Manufacturing and Testing III, H. Stahl, ed., Proc. SPIE 3782, 92-100 (1999).
-
(1999)
Proc. SPIE
, vol.3782
, pp. 92-100
-
-
Arrasmith, S.R.1
Kozhinova, I.A.2
Gregg, L.L.3
Shorey, A.B.4
Romanofsky, H.J.5
Jacobs, S.D.6
Golini, D.7
Kordonski, W.I.8
Hogan, S.9
Dumas, P.10
-
47
-
-
17644372283
-
Determination of subsurface damage in optical materials using a non-invasive technique
-
Optical Society of America, Washington, D.C.
-
J. A. Randi, J. C. Lambropoulos, and S. D. Jacobs, "Determination of subsurface damage in optical materials using a non-invasive technique," in Optical Fabrication and Testing Digest (Optical Society of America, Washington, D.C., 2002), pp. 61-63.
-
(2002)
Optical Fabrication and Testing Digest
, pp. 61-63
-
-
Randi, J.A.1
Lambropoulos, J.C.2
Jacobs, S.D.3
-
48
-
-
84893999036
-
-
Taylor/Hobson, Suite 350, 2100 Golf Road, Rolling Meadows, Ill. 60008
-
Form Talysurf Series 2, Taylor/Hobson, Suite 350, 2100 Golf Road, Rolling Meadows, Ill. 60008.
-
Form Talysurf Series 2
-
-
-
49
-
-
84893999924
-
-
Olympus Optical Co., Inc. 22-2, Nishishinjuka 1-chrome, Shinjuku-ku Tokyo, Japan
-
Olympus Vanox-T Model:AHMT, Olympus Optical Co., Inc. 22-2, Nishishinjuka 1-chrome, Shinjuku-ku Tokyo, Japan.
-
Olympus Vanox-T Model:AHMT
-
-
-
50
-
-
84893998443
-
-
Ono Sokki EG-133, 1-16-1 Hakusan, Midori-ku, Yokohama 226-8507, Japan
-
Ono Sokki EG-133, 1-16-1 Hakusan, Midori-ku, Yokohama 226-8507, Japan.
-
-
-
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