메뉴 건너뛰기




Volumn 44, Issue 12, 2005, Pages 2241-2249

Subsurface damage in some single crystalline optical materials

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; CRYSTALLINE MATERIALS; INTERFEROMETRY; NONDESTRUCTIVE EXAMINATION; RAMAN SCATTERING; SINGLE CRYSTALS; SURFACE ROUGHNESS;

EID: 17644364740     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.44.002241     Document Type: Article
Times cited : (169)

References (50)
  • 1
    • 5544302793 scopus 로고
    • Influence of process parameters in deterministic microgrinding
    • of 1994 OSA Technical Digest Series, (Optical Society of America, Washington, D.C.,) See also Ref. 2
    • D. Golini, A. Lindquist, M. Atwood, and C. Ferreira, "Influence of process parameters in deterministic microgrinding," in Optical Fabrication and Testing Workshop, Vol. 13 of 1994 OSA Technical Digest Series, (Optical Society of America, Washington, D.C., 1994), pp. 28-31. See also Ref. 2.
    • (1994) Optical Fabrication and Testing Workshop , vol.13 , pp. 28-31
    • Golini, D.1    Lindquist, A.2    Atwood, M.3    Ferreira, C.4
  • 3
    • 0004229658 scopus 로고
    • American Institute of Physics, New York, Chap. 4
    • T. S. Izumitani, Optical Glass (American Institute of Physics, New York, 1986), Chap. 4.
    • (1986) Optical Glass
    • Izumitani, T.S.1
  • 5
    • 0026154663 scopus 로고    scopus 로고
    • Ductile-regime grinding: A new technology for machining brittle materials
    • T. G. Bifano, T. A. Dow, and R. O. Scattergood, "Ductile-regime grinding: a new technology for machining brittle materials," ASME J. Eng. Ind. 113, 184-189.
    • ASME J. Eng. Ind. , vol.113 , pp. 184-189
    • Bifano, T.G.1    Dow, T.A.2    Scattergood, R.O.3
  • 6
    • 0025545164 scopus 로고
    • Transition between brittle and ductile mode in loose abrasive grinding
    • Advanced Optical Manufacturing and Testing, L. R. Baker, P. B. Reid, and G. M. Sanger, eds.
    • D. Golini and S. D. Jacobs, "Transition between brittle and ductile mode in loose abrasive grinding," in Advanced Optical Manufacturing and Testing, L. R. Baker, P. B. Reid, and G. M. Sanger, eds., Proc. SPIE 1333, 80-91 (1990).
    • (1990) Proc. SPIE , vol.1333 , pp. 80-91
    • Golini, D.1    Jacobs, S.D.2
  • 7
    • 0030271056 scopus 로고    scopus 로고
    • Twyman effect mechanics in grinding and microgrinding
    • J. C. Lambropoulos, S. Xu, T. Fang, and D. Golini, "Twyman effect mechanics in grinding and microgrinding," Appl. Optics 35, 5704-5713 (1996).
    • (1996) Appl. Optics , vol.35 , pp. 5704-5713
    • Lambropoulos, J.C.1    Xu, S.2    Fang, T.3    Golini, D.4
  • 8
    • 0000553337 scopus 로고
    • Amorphization and conductivity of silicon and germanium induced by indentation
    • D. R. Clarke, M. C. Kroll, P. D. Kirchner, R. F. Cook, and B. J. Hockey, "Amorphization and conductivity of silicon and germanium induced by indentation," Phys. Rev. Lett. 60, 2156-2159 (1988).
    • (1988) Phys. Rev. Lett. , vol.60 , pp. 2156-2159
    • Clarke, D.R.1    Kroll, M.C.2    Kirchner, P.D.3    Cook, R.F.4    Hockey, B.J.5
  • 9
    • 0000144195 scopus 로고    scopus 로고
    • Phase transformations of silicon caused by contact loading
    • A. Kailer, Y. G. Gogotsi, and K. G. Nickel, "Phase transformations of silicon caused by contact loading," J. Appl. Phys. 81, 3057-3063 (1997).
    • (1997) J. Appl. Phys. , vol.81 , pp. 3057-3063
    • Kailer, A.1    Gogotsi, Y.G.2    Nickel, K.G.3
  • 10
    • 18744407253 scopus 로고    scopus 로고
    • Contact resistance and phase transformations during nanoindentation of silicon
    • A. B. Mann, D. van Heerden, J. B. Pethica, P. Bowes, and T. P. Weihs, "Contact resistance and phase transformations during nanoindentation of silicon," Philos. Mag. A82, 1921-1929 (2002).
    • (2002) Philos. Mag. , vol.A82 , pp. 1921-1929
    • Mann, A.B.1    Van Heerden, D.2    Pethica, J.B.3    Bowes, P.4    Weihs, T.P.5
  • 11
    • 0037055283 scopus 로고    scopus 로고
    • Transmission electron microscopy of amorphization and phase transformation beneath indents in Si
    • H. Saka, A. Shimatani, M. Suganuma, and Suprijadi, "Transmission electron microscopy of amorphization and phase transformation beneath indents in Si," Philos. Mag. A82, 1971-1982 (2002).
    • (2002) Philos. Mag. , vol.A82 , pp. 1971-1982
    • Saka, H.1    Shimatani, A.2    Suganuma, M.3    Suprijadi4
  • 12
    • 6344256622 scopus 로고    scopus 로고
    • Examining pressure-induced phase transformations in silicon by spherical inden tation and Raman spectroscopy: A statistical study
    • T. Juliano, V. Domnich, and Y. Gogotsi, "Examining pressure-induced phase transformations in silicon by spherical inden tation and Raman spectroscopy: a statistical study," J. Mater. Res. 19, 3099-3108 (2004).
    • (2004) J. Mater. Res. , vol.19 , pp. 3099-3108
    • Juliano, T.1    Domnich, V.2    Gogotsi, Y.3
  • 13
    • 0343541122 scopus 로고
    • Structure of abraded glass surfaces
    • F. W. Preston, "Structure of abraded glass surfaces," Trans. Opt. Soc. 23(3), 141-164 (1922).
    • (1922) Trans. Opt. Soc. , vol.23 , Issue.3 , pp. 141-164
    • Preston, F.W.1
  • 14
    • 0024750612 scopus 로고
    • State-of-the-art non-destructive measurement of subsurface material properties and damages
    • E. Brinksmeier, "State-of-the-art non-destructive measurement of subsurface material properties and damages," Precis. Eng. 11, 211-224 (1989).
    • (1989) Precis. Eng. , vol.11 , pp. 211-224
    • Brinksmeier, E.1
  • 15
    • 0002561470 scopus 로고
    • Observations by TEM on the subsurface damage produced in aluminum oxide by mechanical polishing and grinding
    • B. J. Hockey, "Observations by TEM on the subsurface damage produced in aluminum oxide by mechanical polishing and grinding," Proc. Br. Ceram. Soc. 20, 95-115 (1972).
    • (1972) Proc. Br. Ceram. Soc. , vol.20 , pp. 95-115
    • Hockey, B.J.1
  • 16
    • 0014735098 scopus 로고
    • X-ray measurement of elastic strain and annealing in semiconductors
    • B. G. Cohen and M. W. Frocht, "X-ray measurement of elastic strain and annealing in semiconductors," Solid-State Electron. 13, 105-112 (1970).
    • (1970) Solid-State Electron. , vol.13 , pp. 105-112
    • Cohen, B.G.1    Frocht, M.W.2
  • 17
    • 0010672754 scopus 로고
    • Comprehensive investigation of polish-induced surface strain in (100) and (111) GaAs and InP
    • Z. Hang, H. Shen, and F. H. Pollak, "Comprehensive investigation of polish-induced surface strain in (100) and (111) GaAs and InP," J. Appl. Phys. 64, 3233-3242 (1988).
    • (1988) J. Appl. Phys. , vol.64 , pp. 3233-3242
    • Hang, Z.1    Shen, H.2    Pollak, F.H.3
  • 18
    • 0021816884 scopus 로고
    • A study of lapping and polishing damage in single-crystal CdTe
    • D. F. Weirauch, "A study of lapping and polishing damage in single-crystal CdTe," J. Electrochem. Soc. 132, 250-254 (1985).
    • (1985) J. Electrochem. Soc. , vol.132 , pp. 250-254
    • Weirauch, D.F.1
  • 19
    • 0005070999 scopus 로고
    • Ultrasonic measurement of surface and subsurface structure in ceramics
    • NIST Special Publ. 847, S. Jahanmir, ed. (U. S. Gov. Printing Office, Washington, D.C.)
    • J. A. Slotwincki, N. N. Hsu, and G. V. Blessing, "Ultrasonic measurement of surface and subsurface structure in ceramics," in Proceeding of the International Conference on Machining of Advanced Materials, NIST Special Publ. 847, S. Jahanmir, ed. (U. S. Gov. Printing Office, Washington, D.C., 1993).
    • (1993) Proceeding of the International Conference on Machining of Advanced Materials
    • Slotwincki, J.A.1    Hsu, N.N.2    Blessing, G.V.3
  • 20
    • 0039789778 scopus 로고
    • Characterization of subsurface damage in GaAs processed by Ga+ focused ion-beam-assisted C12 etching using photoluminescence
    • M. Taneya, Y. Sugimoto, and K. Akita, "Characterization of subsurface damage in GaAs processed by Ga+ focused ion-beam-assisted C12 etching using photoluminescence," J. Appl. Phys. 66, 1375-1381 (1989).
    • (1989) J. Appl. Phys. , vol.66 , pp. 1375-1381
    • Taneya, M.1    Sugimoto, Y.2    Akita, K.3
  • 21
    • 84957349701 scopus 로고
    • Damaged layers in abraded silicon surfaces
    • E. N. Pugh and L. E. Samuels, "Damaged layers in abraded silicon surfaces," J. Electrochem. Soc. 111, 1430-1432 (1964).
    • (1964) J. Electrochem. Soc. , vol.111 , pp. 1430-1432
    • Pugh, E.N.1    Samuels, L.E.2
  • 22
    • 0028442302 scopus 로고
    • Simple technique for observing subsurface damage in machining of ceramics
    • H. H. K. Xu and S. Jahanmir, "Simple technique for observing subsurface damage in machining of ceramics," J. Am. Ceram. Soc. 77, 1388-1390 (1994).
    • (1994) J. Am. Ceram. Soc. , vol.77 , pp. 1388-1390
    • Xu, H.H.K.1    Jahanmir, S.2
  • 23
    • 0013223866 scopus 로고
    • Optical glass fabrication technology. 2. Relationship between surface roughness and subsurface damage
    • D. F. Edwards and P. P. Hed, "Optical glass fabrication technology. 2. Relationship between surface roughness and subsurface damage," Appl. Opt. 26, 4677-4680 (1987).
    • (1987) Appl. Opt. , vol.26 , pp. 4677-4680
    • Edwards, D.F.1    Hed, P.P.2
  • 24
    • 0028743008 scopus 로고
    • Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses
    • Y. Zhou, P. D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, "Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses," J. Amer. Ceram. Soc. 77, 3277-3280 (1994).
    • (1994) J. Amer. Ceram. Soc. , vol.77 , pp. 3277-3280
    • Zhou, Y.1    Funkenbusch, P.D.2    Quesnel, D.J.3    Golini, D.4    Lindquist, A.5
  • 25
    • 0035760747 scopus 로고    scopus 로고
    • The use of magnetorheological finishing (MRF) to relieve residual stress and subsurface damage on lapped semiconductor silicon wafers
    • Optical Manufacturing and Testing IV, H. P. Stahl, ed.
    • S. R. Arrasmith, S. D. Jacobs, J. C. Lambropoulos, A. Maltsev, D. Golini, W. I. Kordonski, and E. E. Cleaveland, "The use of magnetorheological finishing (MRF) to relieve residual stress and subsurface damage on lapped semiconductor silicon wafers," in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE 4451, 286-294 (2001).
    • (2001) Proc. SPIE , vol.4451 , pp. 286-294
    • Arrasmith, S.R.1    Jacobs, S.D.2    Lambropoulos, J.C.3    Maltsev, A.4    Golini, D.5    Kordonski, W.I.6    Cleaveland, E.E.7
  • 26
    • 1842479214 scopus 로고    scopus 로고
    • Deformation of silicon surfaces
    • Optical Materials and Structures Technologies, W. A. Goodman, ed.
    • J. C. Lambropoulos, K.-H. Chen, and T. J. Lambropoulos, "Deformation of silicon surfaces," in Optical Materials and Structures Technologies, W. A. Goodman, ed., Proc. SPIE 5179, 203-214 (2003).
    • (2003) Proc. SPIE , vol.5179 , pp. 203-214
    • Lambropoulos, J.C.1    Chen, K.-H.2    Lambropoulos, T.J.3
  • 27
    • 0010759373 scopus 로고
    • Accumulation of defects in silicon wafers from operation to operation during mechanical finishing process
    • V. A. Perevoshchikov and V. D. Skupov, "Accumulation of defects in silicon wafers from operation to operation during mechanical finishing process," Sov. J. Opt. Technol. 56, 302-305 (1989).
    • (1989) Sov. J. Opt. Technol. , vol.56 , pp. 302-305
    • Perevoshchikov, V.A.1    Skupov, V.D.2
  • 28
    • 0002448091 scopus 로고
    • Silicon wafer deformation after back-side grinding
    • August
    • I. Blech and D. Dang, "Silicon wafer deformation after back-side grinding," Solid State Technol., August, 1994, pp. 74-76.
    • (1994) Solid State Technol. , pp. 74-76
    • Blech, I.1    Dang, D.2
  • 29
    • 0000242089 scopus 로고
    • Strain energy of (111) and (-1-1-1) surfaces of InSb
    • D. Haneman, "Strain energy of (111) and (-1-1-1) surfaces of InSb," Brit. J. Appl. Phys. 16, 411-413 (1965).
    • (1965) Brit. J. Appl. Phys. , vol.16 , pp. 411-413
    • Haneman, D.1
  • 30
    • 0022892115 scopus 로고
    • Residual stress and deformation energy under ground surfaces of brittle solids
    • O. Podzimek and C. J. Heuvelman, "Residual stress and deformation energy under ground surfaces of brittle solids," Ann. CIRP 35, 397-400 (1986).
    • (1986) Ann. CIRP , vol.35 , pp. 397-400
    • Podzimek, O.1    Heuvelman, C.J.2
  • 31
    • 84957474341 scopus 로고
    • Deformation energy under optical surfaces
    • High Power Lasers: Sources, Laser-Material Interactions, High Excitations, and Fast Dynamics, E.-W. Kreutz and D. Schuoecker, eds.
    • O. Podzimek, "Deformation energy under optical surfaces," in High Power Lasers: Sources, Laser-Material Interactions, High Excitations, and Fast Dynamics, E.-W. Kreutz and D. Schuoecker, eds., Proc. SPIE 801, 221-225 (1987).
    • (1987) Proc. SPIE , vol.801 , pp. 221-225
    • Podzimek, O.1
  • 32
    • 0023344323 scopus 로고
    • Comparison of grinding and lapping of ferrites and metals
    • S. Chandrasekhar, M. C. Shaw, and B. Bhushan, "Comparison of grinding and lapping of ferrites and metals," ASME J. Eng. Ind. 109, 76-82 (1987).
    • (1987) ASME J. Eng. Ind. , vol.109 , pp. 76-82
    • Chandrasekhar, S.1    Shaw, M.C.2    Bhushan, B.3
  • 34
    • 0030288892 scopus 로고    scopus 로고
    • Determination of surface residual stresses in machined ceramics using indentation fracture
    • Y. Ahn, S. Chandrasekhar, and T. N. Farris, "Determination of surface residual stresses in machined ceramics using indentation fracture," J. Manuf. Sci. Eng. 118, 483-489 (1996).
    • (1996) J. Manuf. Sci. Eng. , vol.118 , pp. 483-489
    • Ahn, Y.1    Chandrasekhar, S.2    Farris, T.N.3
  • 35
    • 0013359993 scopus 로고
    • The effect of certain physical and mechanical properties on the grinding of brittle materials
    • F. K. Aleinikov, "The effect of certain physical and mechanical properties on the grinding of brittle materials," Sov. Phys. Tech. Phys. 27, 2529-2538 (1957).
    • (1957) Sov. Phys. Tech. Phys. , vol.27 , pp. 2529-2538
    • Aleinikov, F.K.1
  • 36
    • 0033317667 scopus 로고    scopus 로고
    • Non-contact estimate of grinding-induced subsurface damage
    • Optical Instrumentation and Testing III, H. P. Stahl, ed.
    • J. C. Lambropoulos, Y. Li, P. D. Funkenbusch, and J. Ruckman, "Non-contact estimate of grinding-induced subsurface damage," in Optical Instrumentation and Testing III, H. P. Stahl, ed., Proc. SPIE 3782, 41-50 (1999).
    • (1999) Proc. SPIE , vol.3782 , pp. 41-50
    • Lambropoulos, J.C.1    Li, Y.2    Funkenbusch, P.D.3    Ruckman, J.4
  • 37
    • 85134961084 scopus 로고    scopus 로고
    • From abrasive size to subsurface damage in grinding
    • Optical Society of America, Washington, D.C.
    • J. C. Lambropoulos, "From abrasive size to subsurface damage in grinding," in Optical Fabrication and Testing, OSA Technical Digest (Optical Society of America, Washington, D.C., 2000), pp. 17-18.
    • (2000) Optical Fabrication and Testing, OSA Technical Digest , pp. 17-18
    • Lambropoulos, J.C.1
  • 38
    • 0010719233 scopus 로고    scopus 로고
    • Material removal mechanisms from grinding to polishing
    • J. C. Lambropoulos, S. D. Jacobs, and J. Ruckman, "Material removal mechanisms from grinding to polishing," Ceram. Trans. 102, 113-128 (1999).
    • (1999) Ceram. Trans. , vol.102 , pp. 113-128
    • Lambropoulos, J.C.1    Jacobs, S.D.2    Ruckman, J.3
  • 39
    • 84893993834 scopus 로고    scopus 로고
    • ISP Optics, 1 Bridge St., Irvington, N.Y. 10533
    • ISP Optics, 1 Bridge St., Irvington, N.Y. 10533, www.ispoptics.com.
  • 40
    • 84893989571 scopus 로고    scopus 로고
    • Crystal Systems, 27 Congress St., Salem, Mass. 01970
    • Crystal Systems, 27 Congress St., Salem, Mass. 01970, www.crystalsystems.com.
  • 41
    • 84894002693 scopus 로고    scopus 로고
    • Crystal Technology, Inc., 1040 East Meadow Circle, Palo Alto, Calif. 94303-4230
    • Crystal Technology, Inc., 1040 East Meadow Circle, Palo Alto, Calif. 94303-4230.
  • 42
    • 0032749382 scopus 로고    scopus 로고
    • Fracture anisotrophy in silicon single crystal
    • F. Ebrahimi and L. Kalwani, "Fracture anisotrophy in silicon single crystal," Mat. Sci. Eng. A 268, 116-126 (1999).
    • (1999) Mat. Sci. Eng. A , vol.268 , pp. 116-126
    • Ebrahimi, F.1    Kalwani, L.2
  • 44
    • 84893992476 scopus 로고    scopus 로고
    • Optipro Systems, 6368 Dean Parkway, Ontario, N.Y. 14519-8939
    • Optipro Systems, 6368 Dean Parkway, Ontario, N.Y. 14519-8939, www.optipro.com.
  • 45
    • 84893993231 scopus 로고    scopus 로고
    • NewView 5000: Objective, 20× Mirau; FDA resolution, high; scan length, 20 μm bipolar; min mod, 2.00; min area size, 7 Zygo Corp., Laurel Brook Road, Middlefield, Conn. 06455
    • NewView 5000: Objective, 20× Mirau; FDA resolution, high; scan length, 20 μm bipolar; min mod, 2.00; min area size, 7 (Zygo Corp., Laurel Brook Road, Middlefield, Conn. 06455, www.zygo.com).
  • 47
    • 17644372283 scopus 로고    scopus 로고
    • Determination of subsurface damage in optical materials using a non-invasive technique
    • Optical Society of America, Washington, D.C.
    • J. A. Randi, J. C. Lambropoulos, and S. D. Jacobs, "Determination of subsurface damage in optical materials using a non-invasive technique," in Optical Fabrication and Testing Digest (Optical Society of America, Washington, D.C., 2002), pp. 61-63.
    • (2002) Optical Fabrication and Testing Digest , pp. 61-63
    • Randi, J.A.1    Lambropoulos, J.C.2    Jacobs, S.D.3
  • 48
    • 84893999036 scopus 로고    scopus 로고
    • Taylor/Hobson, Suite 350, 2100 Golf Road, Rolling Meadows, Ill. 60008
    • Form Talysurf Series 2, Taylor/Hobson, Suite 350, 2100 Golf Road, Rolling Meadows, Ill. 60008.
    • Form Talysurf Series 2
  • 49
    • 84893999924 scopus 로고    scopus 로고
    • Olympus Optical Co., Inc. 22-2, Nishishinjuka 1-chrome, Shinjuku-ku Tokyo, Japan
    • Olympus Vanox-T Model:AHMT, Olympus Optical Co., Inc. 22-2, Nishishinjuka 1-chrome, Shinjuku-ku Tokyo, Japan.
    • Olympus Vanox-T Model:AHMT
  • 50
    • 84893998443 scopus 로고    scopus 로고
    • Ono Sokki EG-133, 1-16-1 Hakusan, Midori-ku, Yokohama 226-8507, Japan
    • Ono Sokki EG-133, 1-16-1 Hakusan, Midori-ku, Yokohama 226-8507, Japan.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.