High-quality grinding of polycrystalline silicon carbide spherical surfaces

Wear

Volumn 256, Issue 1-2, 2004, Pages 197-207

  Yin, Ling ^a   Vancoille, E Y J ^a   Lee, L C ^a   Huang, H ^a   Ramesh, K ^a   Liu, X D ^a  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

Diamond grinding; Grinding induced damage; Nanometre surface roughness; Polycrystalline silicon carbide; Submicron form accuracy; Wear of diamond tools

Indexed keywords

GRINDING (COMMINUTION); INTERFEROMETRY; POLYCRYSTALLINE MATERIALS; QUALITY CONTROL; SURFACE ROUGHNESS;

FRACTURE DAMAGE; SPHERICAL SURFACES;

SILICON CARBIDE;

DAMAGE; DIAMOND GRINDING; DIAMOND TOOL; SILICON CARBIDE; SURFACE ROUGHNESS; TOOL WEAR;

EID: 0347900556     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(03)00406-X     Document Type: Article

References (39)

1. Suziki H.Kodera S.Nakasuji T.Syoji K.Precision grinding of aspherical CVD-SiC molding die Int. J. Jpn Soc. Pre. Eng. 321 1998 25-30
2. H. Suzuki, T. Kitajima, S. Okuyama, K. Syoji, T. Kuriyagawa, J. Yan, Precision grinding of micro asperical surface-feasibility study of 250μm asperical grinding, in: Proceedings of the ASPE 1998 Annual Meeting, St. Louis, 1998, pp, 149-152.
3. Yin L.Vancoille E.Y.J.Lee L.C.Liu Y.C.Huang H.Ramesh K.High-precision low-damage grinding of polycrystalline SiC Key Eng. Mater. 238/239 2003 59-64
4. Jacobs S.D.Arrasmith S.R.Kozhinova I.A.Gregg I.L.Shorey A.B.Romanofsky H.J.MRF: computer-controlled optics manufacturing Ceram. Bull. 7812 1999 42-48
5. P. McKeown, High Precision manufacturing in an advanced industrial economy, in: Proceedings of the Fourth International Precision Engineering Seminar, Cranfield, 1987.
6. E.Y.J. Vancoille, X.D. Liu, L. Yin, I. Annergrem, Materials selection for durable optical inserts for plastic lenses, in: Proceedings of the International Congress on Advanced Materials, Their Processes and Applications, Paper No. 1051, Munich, 2000, pp. 1-7.
7. Padture N.P.Evans C.J.Xu H.H.K.Lawn B.R.Enhanced machinability of silicon carbide via microstructural design J. Am. Ceram. Soc. 781 1995 215-217
8. Xu H.H.K.Padture N.P.Jahanmir S.Effect of microstructure on material-removal mechanisms and damage tolerance in abrasive machining of silicon carbide J. Am. Ceram. Soc. 789 1995 2443-2448
9. Lawn B.R.Padture N.P.Cai H.Guiberteau F.Making ceramics "ductile" Science 263 1994 1114-1116
10. Padture N.P.Lawn B.R.Contact fatigue of a silicon carbide with a heterogeneous grain structure J. Am. Ceram. Soc. 786 1995 1431-1438
11. Zhong Z.Nakayama T.New grinding methods for aspheric mirrors with large curvature radii Ann. CIRP 411 1992 335-338
12. Ives L.K.Jahanmir S.M. Gill L.Filliben J.J.Effect of grinding on strength of a sintered reaction-bonded silicon nitride Interceram 472 1998 168-173
13. Xu H.H.K.Wei L.Jahanmir S.Grinding force and microcrack density in abrasive machining of silicon nitride J. Mater. Res. 1012 1995 3204-3209
14. Hwang T.W.Evans C.J.Malkin S.An investigation of high speed grinding with electroplated diamond wheels Ann. CIRP 491 2000 245-248
15. H. Huang, L. Yin, L. Zhou, High speed grinding of silicon nitride with resin bond diamond wheels, J. Mater. Process. Technol., in press.
16. H. Huang, L. Yin, High speed grinding performance and material removal mechanism of silicon carbide, in: I. Inasaki (Ed.), Initiatives of Precision Engineering at the Beginning of a Millennium, Kluwer Academic Publications, Massachusetts, 2001, pp. 416-420.
17. Zhang B.Howes T.D.Material removal mechanisms in grinding ceramics Ann. CIRP 44 1995 305-308
18. Xu H.H.K.Jahanmir S.Microfracture and material removal in scratching of alumina J. Mater. Sci. 30 1995 2235-2247
19. Xu H.H.K.Jahanmir S.Wang Y.Effect of grain size on scratch interactions and material removal in alumina J. Am. Ceram. Soc. 784 1995 881-891
20. Dong X.Yin L.Jahanmir S.Ives L.K.Rekow E.D.Abrasive machining of glass-ceramics with a dental handpiece Mach. Sci. Technol. 42 2000 209-233
21. Yin L.Ives L.K.Jahanmir S.Rekow E.D.Romberg E.Abrasive machining of glass-infiltrated alumina with diamond burs Mach. Sci. Technol. 51 2001 43-61
22. L. Yin, S. Jahanmir, L.K. Ives, Abrasive machining of porcelain and zirconia with a dental handpiece, Wear, in press.
23. Xu H.H.K.Jahanmir S.Ives L.K.Effect of grinding on strength of tetragonal zirconia and zirconia-toughened alumina Mach. Sci. Technol. 11 1997 49-66
24. Quinn J.B.Quinn G.D.Indentation brittleness of ceramics: a fresh approach J. Mater. Sci. 32 1997 4331-4346
25. Oliver W.C.Pharr G.M.An improved technique for determining hardness and elastic modulus using load and displace sensing indentation experiments J. Mater. Res. 76 1992 1564-1582
26. Malkin S.Hwang T.W.Grinding mechanisms for ceramics Ann. CIRP 452 1996 1-12
27. I. Marinescu, B. Rowe, L. Yin, H.G. Wobker, Abrasive processes, in: I. Marinescu, H.K. Tonshoff, I. Inasaki (Eds.), Handbook of Ceramic Grinding and Polishing, Noyes Publications/William Andrew Publishing, LLC, New York, 2000, pp. 94-189.
28. Yin L.Marinescu I.D.Mastuo T.Chen R.Investigation of material removal mode in ceramics grinding Tech. Pap. NAMRI 25 1997 51-56
29. S. Jahanmir, H.H.K. Xu, L.K. Ives, Mechanisms of material removal in abrasive machining of ceramics, in: S. Jahanmir, M. Ramulu, P. Koshy (Eds.), Machining of Ceramics and Composites, Marcel Dekker, New York, 1999, pp. 11-84.
30. A.G. Evans, D.B. Marshall, Wear mechanisms in ceramics, in: D.A. Rigney (Ed.), Fundamentals of Friction and Wear of Materials, American Society of Metals, Metal Park, OH, 1981, pp. 439-452.
31. K.L. Bladel, J.S. Taylor, C.J. Evans, Ductile-regime grinding of brittle materials, in: S. Jahanmir, M. Ramulu, P. Koshy (Eds.), Machining of Ceramics and Composites, Marcel Dekker, New York, 1999, pp. 139-174.
32. Zhong Z.Venkatesh V.C.Semi-ductile grinding and polishing of ophthalmic aspherics and spherics Ann. CIRP 441 1995 339-342
33. Chiu W.-C.Endres W.J.Thouless M.D.An experimental study of orthogonal machining of glass Mach. Sci. Technol. 42 2000 253-275
34. Fang F.Z.Chen L.J.Ultra-precision cutting for ZKN7 glass Ann. CIRP 491 2000 17-20
35. Fang F.Z.Venkatesh V.C.Diamond cutting of silicon with nanometric finish Ann. CIRP 471 1998 45-49
36. Bifano T.G.Dow T.A.Scattergood R.O.Ductile-regime grinding: a new technology for machining brittle materials ASME J. Eng. Ind. 1135 1991 184-189
37. Yan J.Syoji K.Kuriyagawa T.Suzuki H.Ductile regime turning at large tool feed J. Mater. Process. Technol. 121 2002 363-372
38. Malkin S.Ritter J.E.Grinding mechanisms and strength degradation for ceramics ASME J. Eng. Ind. 111 1989 167-174
39. Tso P.Yang S.The compensation of geometrical errors on form grinding J. Mater. Process. Technol. 73 1998 82-88