Polymer magnetic microactuators fabricated with hot embossing and layer-by-layer nano self-assembly

Journal of Nanoscience and Nanotechnology

Volumn 7, Issue 8, 2007, Pages 2647-2653

  Xue, Wei ^a   Cui, Tianhong ^a  

^a University of Minnesota   (United States)

Author keywords

Hot embossing; Layer by layer (LbL) nano self assembly; Multilayer; Nanoparticle; Polymer magnetic microactuator

Indexed keywords

HOT EMBOSSING; HOT-EMBOSSING TECHNIQUE; LAYER BY LAYER (LBL); LOW-COST DEVICES; MAGNETIC IRON OXIDES; MAGNETIC MICROACTUATORS; PATTERN TRANSFERRING; POLY METHYL METHACRYLATE (PMMA); POLYMER MAGNETIC; PROCESSING TIME; SELF-ASSEMBLY; SILICON MOLDS; UV LITHOGRAPHY; WET ETCHING TECHNIQUES;

ACTUATORS; IRON; IRON OXIDES; LITHOGRAPHY; MAGNETIC MATERIALS; MICROACTUATORS; MOLDS; PHOTORESISTS; POLYMERS; SELF ASSEMBLY;

OPTICAL DESIGN;

FERRIC ION; FERRIC OXIDE; METAL NANOPARTICLE; NANOPARTICLE; POLY(METHYL METHACRYLATE); POLYMER; UNCLASSIFIED DRUG;

ARTICLE; AUTOMATION; CHEMISTRY; CRYSTALLIZATION; ELECTRODE; EQUIPMENT DESIGN; MAGNETISM; MATERIALS TESTING; METHODOLOGY; NANOTECHNOLOGY; PARTICLE SIZE; STATISTICAL MODEL; SURFACE PROPERTY;

AUTOMATION; CRYSTALLIZATION; ELECTRODES; EQUIPMENT DESIGN; FERRIC COMPOUNDS; MAGNETICS; MATERIALS TESTING; METAL NANOPARTICLES; MODELS, STATISTICAL; NANOPARTICLES; NANOTECHNOLOGY; PARTICLE SIZE; POLYMERS; POLYMETHYL METHACRYLATE; SURFACE PROPERTIES;

EID: 35348841433     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2007.629     Document Type: Article

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