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Volumn 50, Issue 5, 2007, Pages 664-673

Relationship between the orientation of texture and heteroepitaxy of diamond and related materials films on silicon single crystal and the valence electron structure of the interface

Author keywords

Cubic boron nitride; Diamond; Films; Heteroepitaxy; Interface electron density; Texture

Indexed keywords

CUBIC BORON NITRIDE; DIAMONDS; EPITAXIAL GROWTH; INTERFACES (MATERIALS); MICROELECTRONICS; SINGLE CRYSTALS;

EID: 35148897884     PISSN: 10069321     EISSN: 1862281X     Source Type: Journal    
DOI: 10.1007/s11431-007-0071-8     Document Type: Article
Times cited : (5)

References (33)
  • 2
    • 0007865590 scopus 로고    scopus 로고
    • Effects of hydrogen ion bombardment and boron doping on (001) polycrystalline diamond films
    • Xia Y B, Sekiguchi T, Zhang W J, et al. Effects of hydrogen ion bombardment and boron doping on (001) polycrystalline diamond films. J Cryst Growth, 2000, 213: 328-333
    • (2000) J Cryst Growth , vol.213 , pp. 328-333
    • Xia, Y.B.1    Sekiguchi, T.2    Zhang, W.J.3
  • 3
    • 21544458177 scopus 로고
    • A new method for generation of diamond nuclei by plasma CVD
    • Yugo S, Kanai T, Kimura T. A new method for generation of diamond nuclei by plasma CVD. Diamond Relat Mat, 1992, 1: 388-391
    • (1992) Diamond Relat Mat , vol.1 , pp. 388-391
    • Yugo, S.1    Kanai, T.2    Kimura, T.3
  • 4
    • 0033357945 scopus 로고    scopus 로고
    • Characterization of interface of c-BN film deposited on silicon (100) substrate
    • Tian J Z, Xia L F, Ma X X. Characterization of interface of c-BN film deposited on silicon (100) substrate. Thin Solid Films, 1999, 355-356: 229-232
    • (1999) Thin Solid Films , vol.355-356 , pp. 229-232
    • Tian, J.Z.1    Xia, L.F.2    Ma, X.X.3
  • 5
    • 0029735091 scopus 로고    scopus 로고
    • Texture-controlled diamond films synthesized by microwave plasma-enhanced chemical vapor deposition
    • Kim Y-K, Lee K-Y, Lee J-Y. Texture-controlled diamond films synthesized by microwave plasma-enhanced chemical vapor deposition. Thin Solid Films, 1996, 272: 64-70
    • (1996) Thin Solid Films , vol.272 , pp. 64-70
    • Kim, Y.-K.1    Lee, K.-Y.2    Lee, J.-Y.3
  • 6
    • 31244432095 scopus 로고    scopus 로고
    • Research on the growth and application of heteroepitaxy diamond films
    • 6
    • Wang S X. Research on the growth and application of heteroepitaxy diamond films. Rare Metal Mat Eng (in Chinese), 2001, 30(6): 440-443
    • (2001) Rare Metal Mat Eng (In Chinese) , vol.30 , pp. 440-443
    • Wang, S.X.1
  • 7
    • 35148821929 scopus 로고
    • Experiment research on the heteroepitaxy diamond films on the silicon substrate with the (001) orientation
    • Yang J, Chen Q J, Lin Z D, et al. Experiment research on the heteroepitaxy diamond films on the silicon substrate with the (001) orientation. Prog Nat Sci (in Chinese), 1995, 3: 233-235
    • (1995) Prog Nat Sci (In Chinese) , vol.3 , pp. 233-235
    • Yang, J.1    Chen, Q.J.2    Lin, Z.D.3
  • 8
    • 0034095761 scopus 로고    scopus 로고
    • Towards homogeneous and reproducible highly oriented diamond films
    • Saada S, Barrat S, Bauer-Grosse E. Towards homogeneous and reproducible highly oriented diamond films. Diamond Relat Mat, 2000, 9: 300-304
    • (2000) Diamond Relat Mat , vol.9 , pp. 300-304
    • Saada, S.1    Barrat, S.2    Bauer-Grosse, E.3
  • 9
    • 6344278693 scopus 로고    scopus 로고
    • Texture formation mechanism of vapor deposited f.c.c thin film on polycrystal or amorphous substrate
    • 39
    • Li Z L, Xu H B, Gong S K. Texture formation mechanism of vapor deposited f.c.c thin film on polycrystal or amorphous substrate. J Phys Chem B, 2004, 108(39): 15165-15171
    • (2004) J Phys Chem B , vol.108 , pp. 15165-15171
    • Li, Z.L.1    Xu, H.B.2    Gong, S.K.3
  • 10
    • 0000940863 scopus 로고
    • Empirical electron theory in solids and molecules
    • Yu R H. Empirical electron theory in solids and molecules. Chin Sci Bull (in Chinese), 1978, 23: 217-224
    • (1978) Chin Sci Bull (In Chinese) , vol.23 , pp. 217-224
    • Yu, R.H.1
  • 12
    • 0033226050 scopus 로고    scopus 로고
    • Catalysis mechanism and catalyst design of diamond growth
    • 11
    • Liu Z L, Li Z L, Sun Z G. Catalysis mechanism and catalyst design of diamond growth. Metall Mater Trans A, 1999, 30(11): 2757-2766
    • (1999) Metall Mater Trans A , vol.30 , pp. 2757-2766
    • Liu, Z.L.1    Li, Z.L.2    Sun, Z.G.3
  • 14
    • 0042225659 scopus 로고    scopus 로고
    • Phase structure factors and interface conjunction factors of alloys and their applications to alloy design
    • 7
    • Li Z L, Liu Z L, Sun Z G. Phase structure factors and interface conjunction factors of alloys and their applications to alloy design. Acta Metall Sin (in Chinese), 1999, 35(7): 673-681
    • (1999) Acta Metall Sin (In Chinese) , vol.35 , pp. 673-681
    • Li, Z.L.1    Liu, Z.L.2    Sun, Z.G.3
  • 15
    • 35148837220 scopus 로고    scopus 로고
    • Research on the nucleation and growth of diamond films with the (100) texture under nitrogen circumstances
    • 9
    • Li C H, Liao Y, Chang C. Research on the nucleation and growth of diamond films with the (100) texture under nitrogen circumstances, Phys Transac (in Chinese). 2000, 49(9): 1756-1762
    • (2000) Phys Transac (In Chinese) , vol.49 , pp. 1756-1762
    • Li, C.H.1    Liao, Y.2    Chang, C.3
  • 16
    • 35148814054 scopus 로고    scopus 로고
    • Research on the influence of bias on the selected nucleation and growth of diamond films
    • 5
    • Zhang W G, Xia Y B, Ju J H, et al. Research on the influence of bias on the selected nucleation and growth of diamond films. Funct Mat (in Chinese), 2000, 31(5): 510-512
    • (2000) Funct Mat (In Chinese) , vol.31 , pp. 510-512
    • Zhang, W.G.1    Xia, Y.B.2    Ju, J.H.3
  • 17
    • 35148866716 scopus 로고
    • Morphological analysis of diamond films and the preferential growth of the (100)
    • 6
    • Zhu X D, Zhan R J. Morphological analysis of diamond films and the preferential growth of the (100). Vacuum Sci Tech (in Chinese), 1995, 15(6): 420-423
    • (1995) Vacuum Sci Tech (In Chinese) , vol.15 , pp. 420-423
    • Zhu, X.D.1    Zhan, R.J.2
  • 18
    • 0042321997 scopus 로고    scopus 로고
    • An FTIR study of the heteroepitaxy of diamond on silicon
    • John P, Graham C, Milne D K. An FTIR study of the heteroepitaxy of diamond on silicon. Diamond Relat Mat, 1996, 5: 256-260
    • (1996) Diamond Relat Mat , vol.5 , pp. 256-260
    • John, P.1    Graham, C.2    Milne, D.K.3
  • 19
    • 0038577142 scopus 로고    scopus 로고
    • Bias enhanced nucleation of diamond on silicon (100) in a HFCVD system
    • Janischowsky K, Ebert W, Kohn E. Bias enhanced nucleation of diamond on silicon (100) in a HFCVD system. Diamond Relat Mat, 2003, 12: 336-339
    • (2003) Diamond Relat Mat , vol.12 , pp. 336-339
    • Janischowsky, K.1    Ebert, W.2    Kohn, E.3
  • 20
    • 0003911637 scopus 로고    scopus 로고
    • Deposition of heteroepitaxial diamond films on 2 in silicon substrates
    • Jiang X, Paul M, Klages C-P. Deposition of heteroepitaxial diamond films on 2 in silicon substrates. Diamond Relat Mat, 1996, 5: 251-255
    • (1996) Diamond Relat Mat , vol.5 , pp. 251-255
    • Jiang, X.1    Paul, M.2    Klages, C.-P.3
  • 22
    • 0000470750 scopus 로고    scopus 로고
    • Heteroepitaxial growth of diamond thin films on silicon information transfer by epitaxial tilting
    • Plitzko J, Rosler M, Nickel K G. Heteroepitaxial growth of diamond thin films on silicon information transfer by epitaxial tilting, Diamond Relat Mat, 1997, 6: 935-939
    • (1997) Diamond Relat Mat , vol.6 , pp. 935-939
    • Plitzko, J.1    Rosler, M.2    Nickel, K.G.3
  • 23
    • 0003922241 scopus 로고    scopus 로고
    • Optimizing control of microwave plasma bias enhanced nucleation for heteroeptiaxial chemical vapour deposition diamond
    • Duncan Marshall R, Whitfield M D. Optimizing control of microwave plasma bias enhanced nucleation for heteroeptiaxial chemical vapour deposition diamond. Diamond Relat Mat, 1997, 6: 676-680
    • (1997) Diamond Relat Mat , vol.6 , pp. 676-680
    • Duncan Marshall, R.1    Whitfield, M.D.2
  • 24
    • 0038238363 scopus 로고    scopus 로고
    • Quantitative characterization of the true epitaxial ratio in the first stage of the MPCVD diamond synthesis
    • Choi I-H, Barrat S, Bauer-Grosse E. Quantitative characterization of the true epitaxial ratio in the first stage of the MPCVD diamond synthesis. Diamond Relat Mat, 2003, 12: 361-364
    • (2003) Diamond Relat Mat , vol.12 , pp. 361-364
    • Choi, I.-H.1    Barrat, S.2    Bauer-Grosse, E.3
  • 25
    • 35148888245 scopus 로고    scopus 로고
    • Research on the growth morphology of diamond films chemical vapor deposited under low bias
    • 5
    • Wang C X, Wang J H. Research on the growth morphology of diamond films chemical vapor deposited under low bias. Mater Protect (in Chinese), 2003, 36(5): 1-4
    • (2003) Mater Protect (In Chinese) , vol.36 , pp. 1-4
    • Wang, C.X.1    Wang, J.H.2
  • 26
    • 26644462171 scopus 로고    scopus 로고
    • Research on the growth kinetics of hot wire CVD diamond with large area
    • 3
    • Wang A Y, Ke P L. Research on the growth kinetics of hot wire CVD diamond with large area. New Carbon Mater (in Chinese), 2005, 20(3): 229-234
    • (2005) New Carbon Mater (In Chinese) , vol.20 , pp. 229-234
    • Wang, A.Y.1    Ke, P.L.2
  • 27
    • 20344396384 scopus 로고    scopus 로고
    • Preparation and the electric properties of CVD diamond films with (100) orientation
    • 5
    • Su Q F, Xia Y B, Wang L J. Preparation and the electric properties of CVD diamond films with (100) orientation. Semiconduc Trans (in Chinese), 2005, 26(5): 947-951
    • (2005) Semiconduc Trans (In Chinese) , vol.26 , pp. 947-951
    • Su, Q.F.1    Xia, Y.B.2    Wang, L.J.3
  • 28
    • 0043137775 scopus 로고    scopus 로고
    • Growth and defects of diamond facets under negative biasing conditions in a microwave plasma CVD process
    • Thtirer K-H, Schreck M, Stritzker B. Growth and defects of diamond facets under negative biasing conditions in a microwave plasma CVD process. Diamond Relat Mat, 1997, 6: 1010-1014
    • (1997) Diamond Relat Mat , vol.6 , pp. 1010-1014
    • Thtirer, K.-H.1    Schreck, M.2    Stritzker, B.3
  • 29
    • 0030102544 scopus 로고    scopus 로고
    • Oriented and textured growth of (111) diamond on silicon using hot filament chemical vapour deposition
    • Chen Q J, Chen Y, Yang J. Oriented and textured growth of (111) diamond on silicon using hot filament chemical vapour deposition. Thin Solid Films, 1996, 274: 160-164
    • (1996) Thin Solid Films , vol.274 , pp. 160-164
    • Chen, Q.J.1    Chen, Y.2    Yang, J.3
  • 30
    • 0033361422 scopus 로고    scopus 로고
    • Characterization of ion-assisted pulsed laser deposited cubic boron nitride films
    • Weissmantel S, Reisse G. Characterization of ion-assisted pulsed laser deposited cubic boron nitride films. Thin Solid Films, 1999, 355-356: 256-262
    • (1999) Thin Solid Films , vol.355-356 , pp. 256-262
    • Weissmantel, S.1    Reisse, G.2
  • 31
    • 0033528890 scopus 로고    scopus 로고
    • Deposition of c-BN films on diamond: Influence of the diamond roughness
    • Pascallon J, Stambouli V, Ilias S, et al. Deposition of c-BN films on diamond: influence of the diamond roughness. Mat Sci Eng, 1999, B59: 239-243
    • (1999) Mat Sci Eng , vol.59 , pp. 239-243
    • Pascallon, J.1    Stambouli, V.2    Ilias, S.3
  • 32
    • 21344456716 scopus 로고    scopus 로고
    • Microstructure of the intermediate turbostratic boron nitride layer
    • Zhang X W, Boyen H-G. Microstructure of the intermediate turbostratic boron nitride layer. Diamond Relat Mat, 2005, 14: 1474-1481
    • (2005) Diamond Relat Mat , vol.14 , pp. 1474-1481
    • Zhang, X.W.1    Boyen, H.-G.2
  • 33
    • 2442495119 scopus 로고    scopus 로고
    • Growth mechanism for epitaxial cubic boron nitride films on diamond substrates by ion beam assisted deposition
    • Zhang X W, Boyen H-G, Ziemann P, et al. Growth mechanism for epitaxial cubic boron nitride films on diamond substrates by ion beam assisted deposition. Diamond Relat Mat, 2004, 13: 1144-1148
    • (2004) Diamond Relat Mat , vol.13 , pp. 1144-1148
    • Zhang, X.W.1    Boyen, H.-G.2    Ziemann, P.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.