An advanced AFM sensor: Its profile accuracy and low probe wear property for high aspect ratio patterns

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6518, Issue PART 3, 2007, Pages

  Watanabe, Masahiro ^a   Baba, Shuichi ^a   Nakata, Toshihiko ^a   Kurenuma, Toru ^b   Kunitomo, Yuichi ^b   Edamura, Manabu ^b  

^a HITACHI LTD   (Japan)

^b Hitachi kenki Finetech Co Ltd   (Japan)

Author keywords

AFM; Depth; High aspect ratio; In line; Profile

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; PROBES; SCANNING; SENSORS; SPURIOUS SIGNAL NOISE; WEAR OF MATERIALS;

3D MONITORING TOOL; AFM SENSOR; COPPER DAMASCENE INTERCONNECTS; DEEP TRENCH STRUCTURES; DYNAMICS SIMULATION; HDC (HIGH DENSITY CARBON); SPIKE NOISE; STEEP SAMPLE SLOPES;

METRIC SYSTEM;

EID: 35148847882     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.711526     Document Type: Conference Paper

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