Film properties and integration performance of a nano-porous carbon doped oxide

Proceedings of the IEEE 2004 International Interconnect Technology Conference

Volumn , Issue , 2004, Pages 142-144

  Dixit, Girish ^a   D'Cruz, Lester ^a   Ahn, Sang ^a   Zheng, Yi ^a   Chang, Josephine ^a   Naik, Mehul ^a   Demos, Alex ^a   Witty, Derek ^a   M'saad, Hichem ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; CARBON; DESORPTION; DIELECTRIC FILMS; DOPING (ADDITIVES); ELECTRON BEAMS; OXIDES; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POROUS MATERIALS; SECONDARY ION MASS SPECTROMETRY; THERMODYNAMIC STABILITY;

CARBON DOPED OXIDE (CDO) FILMS; DIELECTRIC ANTIREFLECTIVE COATINGS (DARC); ELECTRON BEAM TREATMENT; THERMAL DESORPTION SPECTROSCOPY (TDS);

NANOSTRUCTURED MATERIALS;

EID: 8644282869     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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