Proposal for new atomic force microscopy (AFM) imaging for a high aspect structure (digital probing mode AFM)

Microelectronic Engineering

Volumn 57-58, Issue , 2001, Pages 651-657

  Hosaka, S ^a   Morimoto, T ^a   Kuroda, K ^a   Kunitomo, H ^a   Hiroki, T ^a   Kitsukawa, T ^a   Miwa, S ^a   Yanagimoto, H ^a   Murayama, K ^a  

^a GUNMA UNIVERSITY   (Japan)

Author keywords

3D imaging; Atomic force microscopy (AFM); CMP; Digital probing mode AFM; High aspect structures; In line monitor; LSI process monitor

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL MECHANICAL POLISHING; DRY ETCHING; LSI CIRCUITS; SCANNING ELECTRON MICROSCOPY;

SHALLOW TRENCH ISOLATION (STI);

IMAGING TECHNIQUES;

EID: 0035450072     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00551-2     Document Type: Article

References (5)