SCOPUS 정보 검색 플랫폼

Volumn 4689 I, Issue , 2002, Pages 492-499

New AFM imaging for an in-line LSI process monitor

Author keywords

3D imaging; 3D metrology; AFM; Digital probing mode; High aspect; In line monitor; Nanometer; SPM; Step in mode; STI

Indexed keywords

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; DRY ETCHING; FRICTION; IMAGING TECHNIQUES; LSI CIRCUITS; SCANNING; SERVOMECHANISMS;

DIGITAL PROBING MODE;

PHOTORESISTS;

EID: 0036031277 PISSN: 0277786X EISSN: None Source Type: Journal
DOI: 10.1117/12.473488 Document Type: Article

Times cited : (7)

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